Skip to main content
SpringerLink
Log in

Small-scale equipment for producing thin-film devices

  • Published:
Soviet Physics Journal Aims and scope

Abstract

Small-scale equipment for producing thin-film devices is described. The equipment enables metal deposition and thermal processing to be carried out in vacuum. The electrical properties can be investigated at room temperature as well as during heating and cooling.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Similar content being viewed by others

References

  1. G. P. Shkurin, Handbook of Electrical and Radio Measuring Instruments [in Russian], Moscow, 1955.

  2. B. G. Livshits, The Physical Properties of Metals and Alloys [in Russian], Mashgiz, 1956.

  3. E. Z. Kaminskii and G. V. Kurdyumov, Zavodskaya laboratoriya, no. 10, 7, 1938.

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Kiev Polytechnic Institute, USSR

    M. V. Belous, V. P. Kocheshkov & V. G. Permyakov

Authors
  1. M. V. Belous
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. V. P. Kocheshkov
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. G. Permyakov
    View author publications

    You can also search for this author in PubMed Google Scholar

Rights and permissions

Reprints and permissions

About this article

Cite this article

Belous, M.V., Kocheshkov, V.P. & Permyakov, V.G. Small-scale equipment for producing thin-film devices. Soviet Physics Journal 9, 111–113 (1966). https://doi.org/10.1007/BF00818755

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00818755

Keywords

Search

Navigation