Abstract
The dependence of Tc on sputtering conditions, chemical composition, and phase structure for Nb-Ge films has been studied. It was found that Tc varied with composition, but was not dependent on exact stoichiometry of the film; the Nb/Ge ratio was <3 for very high Tc ∼23 K films and ∼4 for films with Tc ∼20 K. X-ray results showed that the films with Tc ∼23 K contained a certain amount of tetragonal Nb5Ge3 with a lattice parameter of A15 phase ∼5.14 Å. The depth profile of very high Tc films showed no increase of oxygen concentration at the film-substrate interface; no correlation of high Tc and impurities was found.
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Li, L., Zhao, Br., Zhou, P. et al. Preparation and analysis of high-T c Nb-Ge films. J Low Temp Phys 45, 287–294 (1981). https://doi.org/10.1007/BF00655135
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DOI: https://doi.org/10.1007/BF00655135