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The use of electrostatic probes for plasma diagnostics—A review

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Abstract

The use of electrostatic, or Langmuir, probes for plasma diagnostics is reviewed. The emphasis is on experimental implementation and current techniques, and particular attention is paid to sources of error in theoretical interpretation as well as to experimental problems that can occur in complex, reactive plasmas.

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  1. Department of Electrical Engineering, University of Florida, 32611, Gainesville, Florida

    B. E. Cherrington

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Cherrington, B.E. The use of electrostatic probes for plasma diagnostics—A review. Plasma Chem Plasma Process 2, 113–140 (1982). https://doi.org/10.1007/BF00633129

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  • DOI: https://doi.org/10.1007/BF00633129

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