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Laser fluorescence measurements of the flux density of titanium sputtered from an oxygen covered surface

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Abstract

Laser-induced fluorescence spectroscopy is successfully used for the determination of the flux of ion-sputtered wall material. If the surface is clean, the majority of the particles are found in the groundstate multiplet of the neutral atoms. For an oxidized surface, however, excited and ionized states constitute a considerable fraction of the sputtered particle flux. This is investigated in detail in this paper by measuring population densities and velocity distributions of some selected atomic and ionic states of titanium. The respective flux densities and fractions of the total flux density are given, too. A criterion is found which may help to distinguish a clean from a heavily oxidized surface.

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  1. E. Dullni

    Present address: Research Centre, Brown Boveri & Cie, CH-5405, Baden-Dättwil, Switzerland

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  1. Institut für Experimentalphysik V, Ruhr-Universität, D-4630, Bochum, Germany

    E. Dullni

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  1. E. Dullni
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Dullni, E. Laser fluorescence measurements of the flux density of titanium sputtered from an oxygen covered surface. Appl. Phys. A 38, 131–138 (1985). https://doi.org/10.1007/BF00620464

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  • DOI: https://doi.org/10.1007/BF00620464

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