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Relationship between optical and structural properties of hydrogenated amorphous silicon

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Abstract

A series of experimental studies has been made on the relationship between optical and structural properties of hydrogenated amorphous silicon (a-Si:H) prepared under various conditions. It has been clarified by analysing the results that the shape of the energy spectrum near the band edge and the distribution of the valence-band tail states depend primarily on the structural disorder of the Si network in a-Si:H. On the other hand, the total content and the bonding mode of bonded hydrogen have little effects on these electronic properties of a-Si:H. It has also been found that the distribution of the valenceband tail states might be related to other unidentified factor(s) besides the structural disorder. The present results have been compared with those of the previous experimental and theoretical studies.

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Authors and Affiliations

  1. Device Synthesis Section, Electrotechnical Laboratory, 1-1-4 Umezono, Tsukuba, 305, Ibaraki, Japan

    I. Sakata, M. Yamanaka, S. Okazaki & Y. Hayashi

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  1. I. Sakata
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  2. M. Yamanaka
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  3. S. Okazaki
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  4. Y. Hayashi
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Sakata, I., Yamanaka, M., Okazaki, S. et al. Relationship between optical and structural properties of hydrogenated amorphous silicon. Appl. Phys. A 48, 295–304 (1989). https://doi.org/10.1007/BF00618889

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  • DOI: https://doi.org/10.1007/BF00618889

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