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The effect of surface roughness on the resistivity increase of thin metal films during gas adsorption

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Abstract

The resistivity increase of very thin metal films during gas adsorption is stronger than predicted by the commond −1 law. This effect is contributed to surface roughness. A quantitative theory is presented which leads to an additionald −3 term. The theory is checked using literature data obtained for the Ag/O2 system.

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Author notes

  1. H. -U. Finzel

    Present address: DIEHL, D-8503, Röthenbach, Federal Republic of Germany

  2. E. Schmiedl

    Present address: Rehau Plastics, D-8520, Eltersdorf, Federal Repulic of Germany

Authors and Affiliations

  1. Institut für Physikalische und Theoretische Chemie, Universität, Egerlandstrasse 3, D-8520, Erlangen, Federal Republic of Germany

    H. -U. Finzel, E. Schmiedl & P. Wißmann

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  1. H. -U. Finzel
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  2. E. Schmiedl
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  3. P. Wißmann
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Finzel, H.U., Schmiedl, E. & Wißmann, P. The effect of surface roughness on the resistivity increase of thin metal films during gas adsorption. Appl. Phys. A 42, 87–90 (1987). https://doi.org/10.1007/BF00618162

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  • DOI: https://doi.org/10.1007/BF00618162

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