Abstract
In this paper, we present an analysis of antinomy deposition on silicon in the range of 0.1 to 1 monolayer by in situ spectroscopic ellipsometry. After a careful choice of viewpoint material, ellipsometric measurements are found to be sensitive to small surface perturbations, especially with antimony. In fact, less than a 0.1 monolayer of antimony on silicon at room temperature is detectable. Moreover, a linear dependence of the ellipsometric signal on Sb coverage is observed in the monolayer range. Consequently, the signal versus time variation directly gives the Sb adsorption kinetics on silicon. The saturation to one monolayer of compact antimony on silicon surface is used in order to calibrate the spectra.
Similar content being viewed by others
References
C.E.C. Wood:Molecular Beam Epitaxy and Heterostructures, ed. by L.L. Chang, K. Ploog, NATO ASI series; Appl. Sci.87, 149 (1985)
S. Andrieu, F. Arnaud d'Avitaya, J.C. Pfister: J. Appl. Phys.65, 2681 (1989)
H. Jorke, H.J. Herzog, H. Kibbel: Appl. Phys. Lett.47, 511 (1985)
R.A.A. Kubiak, W.Y. Leong, E.H.C. Parker: Appl. Phys. Lett.46, 565 (1985)
S. Delage, Y. Campidelli, F. Arnaud d'Avitaya, S. Tatarenko: J. Appl. Phys.61, 1404 (1987)
T. Smith: J. Opt. Soc. Am.58, 1069 (1968)
B. Drevillon, C. Godet, Satyendra Kumar: Appl. Phys. Lett.50, 1651 (1987)
F.H.P.M. Habraken, G.A. Bootsma: Act. Elect.24, 167 (1981/1982)
M.R. Baklanov, V.N. Kruchinin, S.M. Repinskii, A.A. Shklyaev: Phys. Chem. Mech. Surf.11, 3325 (1985)
R.M.A. Azzam, N.M. Bashara:Ellipsometry and Polarized Light (North-Holland, Amsterdam 1977)
G.E. Jellison, Jr., F.A. Modine: Phys. Rev. B27, 7466 (1983)
F. Lukes: Phys. Stat. Solidi102, 803 (1987)
T.V. Vorburger, K.C. Ludema: Appl. Opt.19, 561 (1980)
J.R. Blanco, P.J. McMarr, K. Vedam: Appl. Opt.22, 3773 (1985)
J.A. Appelbaum, D.P. Hamann: Surf. Sci.74, 21 (1978)
R.J. Culbertson, L.C. Feldman, P.J. Silverman: Phys. Rev. Lett.45, 2043 (1980)
J. Monin, G. Boutry: Nouv. Rev. Optique4, 159 (1973)
F.L. McCrackin: J. Opt. Soc. Am.60, 57 (1970)
R.M.A. Azzam, N.M. Bashara: J. Opt. Soc. Am.61, 773 (1971)
D.E. Aspnes:Optical Properties of Solids — New Developments, ed. by P.O. Seraphin (North-Holland, Amsterdam 1976) p. 799
D.C. Streit, F.G. Allen: J. Appl. Phys.61, 2894 (1987)
G. Quentel, M. Gauch, A. Degiovani: Surf. Sci.193, 212 (1988)
R.A. Metzger, F.G. Allen: Surf. Sci.137, 397 (1984)
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Andrieu, S., Ferrieu, F. & Arnaud d'Avitaya, F. In situ spectroscopic ellipsometry: Application to Sb coverage measurement in the monolayer range on Si (111). Appl. Phys. A 49, 719–722 (1989). https://doi.org/10.1007/BF00616999
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF00616999