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Lateral growth rates in laser CVD of microstructures

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Abstract

Lateral growth rates of Ni spots deposited on absorbing substrates by decomposition of Ni(CO)4 with visible Kr+ laser light have been measured. The experimental data are consistent with the calculated temperature distributions. The mechanism of decomposition is thermal with an apparent chemical activation energy of 22±3 kcal/mole for the temperature range 350 K≦T≦500 K.

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Petzoldt, F., Piglmayer, K., Kräuter, W. et al. Lateral growth rates in laser CVD of microstructures. Appl. Phys. A 35, 155–159 (1984). https://doi.org/10.1007/BF00616969

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  • DOI: https://doi.org/10.1007/BF00616969

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