Abstract
The chemical relaxation technique consists of measuring the response of a chemical system to a small disturbance of an equilibrium or a nonequilibrium steady state. Since, for a small perturbation, the response of any complex and stable system is linear, rate constants of elementary processes under actual plasma conditions can be evaluated directly from the relaxation data. Applications of this technique to the kinetic study of the formation and decomposition of silane are presented and compared with previous data obtained by a flow method. In addition, relaxation data are presented which show that the main reaction channel of silance decomposition in glow discharges is the electron-impact-induced fragmentation into SiH2 radicals (or ions) and H2 molecules.
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References
J. J. Wagner and S. Vepřek,Plasma Chem. Plasma Process. 2, 95 (1982).
M. Eigen and L. De Maeyer, Relaxation Methods, in:Techniques of Organic Chemistry, Vol. VIII, Part II, Chapter XVIII. A. Weissberger, ed., Wiley, New York (1963).
G.H. Czerlinski,Chemical Relaxation, Marcel Dekker, New York (1966).
D. N. Hague,Fast Reaction, Wiley, London (1971).
F.-A. Sarott, Diplomarbeit (M.Sc. Thesis), University of Zürich (1981).
S. Vepřek, Proceedings of the 11th International Symposium and Summer School on the Physics of Ionized Gases, Invited Lectures, Dubrovnik, August 1982, in press.
S. Vepřek, Proceedings of the Semiconductor Processing and Equipment Symposium, SEMICON/EUROPA '83, Zürich, March 1983, p. 217, Semiconductor Equipment and Materials Inst., Inc., Mountain View, CA. 94043.
S. Vepřek, Z. Iqbal, H. R. Oswald, F.-A. Sarott, and J. J. Wagner,J. Phys. (Paris)42, C4, 251 (1981).
S. Vepřek,Pure Appl. Chem. 54, 1197 (1982).
G. Turban, Y. Catherine, and B. Grolleau,Plasma Chem. Plasma Process. 2, 61 (1982).
G. Turban, Y. Catherine, and B. Grolleau,Thin Solid Films 60, 147 (1979);67, 309 (1980);77, 287 (1981).
A. Garscadden, private communication.
S. Vepřek, K. Ensslen, and J. J. Wagner, Proceedings of 6th International Symposium on Plasma Chemistry, Montreal, July 1983, in press.
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Wagner, J.J., Vepřek, S. Chemical relaxation study of the heterogeneous silicon-hydrogen system under plasma conditions. Plasma Chem Plasma Process 3, 219–234 (1983). https://doi.org/10.1007/BF00566021
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DOI: https://doi.org/10.1007/BF00566021