Abstract
Probe measurements reveal that the plasma produced by a hot-cathode arc contains two groups of electrons, with temperatures ≈4 and 10 eV, with a density of 1010–1011 cm−3. These electrons are distributed uniformly over a volume of 0.2 m3. The discharge voltage is found as a function of the gas pressure and the heater current. Low-temperature regimes of the deposition of TiN coatings on metals and insulators after a plasma processing of the articles are described. The design of the discharge system is discussed.
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Additional information
Institute of High-Current Electronics, Siberian Branch, Russian Academy of Sciences. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 3, pp. 115–120, March, 1994.
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Borisov, D.P., Koval', N.N. & Shchanin, P.M. Production of a large-volume plasma by a hot-cathode arc. Russ Phys J 37, 295–299 (1994). https://doi.org/10.1007/BF00565740
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DOI: https://doi.org/10.1007/BF00565740