Skip to main content
Log in

Field ion microscopy of ion-implanted alloys

  • Published:
Russian Physics Journal Aims and scope

Abstract

In this review we describe research in which field ion microscopy is used for the first time for a precision investigation of the structural and phase changes that occur in the surface layers of ordered and aging alloys as a result of implantation with ions of different gases. It is established that when ordered and aging solid solutions are irradiated with gas ions with an energy of 15–40 keV and doses of 1013–1018 ion/cm2 a structural phase transition occurs in the surface volume of the alloys. Radiationally disordered zones in the case of order-disorder transitions and ordered zones in the case of the reverse transition are detected and their dimensions are found. The atomic structure of the defects formed due to ion implantation are studied, these include radiationally disordered regions, dislocation configurations, dislocation loops and barriers, and also complexes of these defects localised in small volumes, and the segregation of atoms of one of the components. The structure of these defects in regions of single cascades of atomic displacements, their dimensions and mutual arrangement and their crystal-geometric characteristics are determined.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. V. A. Ivchenko, N. N. Syutkin, and A. Yu. Bunkin, J. Phys.49, No. 6, 379–383 (1988).

    Google Scholar 

  2. A. Yu. Bunkin et al, Fiz. Met. Metalloved.,69, No. 4, 171–175 (1990).

    Google Scholar 

  3. A. Yu. Bunkin et al, Fiz. Met. Metalloved.,70, No. 7, 111–118 (1990).

    Google Scholar 

  4. A. Yu. Bunkin et al, Royal Microscopical Society,24, Part 4, Suppl. S25 (1989).

  5. N. N. Syutkin, V. A. Ivchenko, and A. Yu. Bunkin, Proc. Scientific Council on “Processing of Structural Materials by Beams of Charged Particles”, Moscow (1988), pp. 25–32.

  6. V. A. Ivchenko and N. N. Syutkin, 7th SMMIB: Abstracts. Washington, DC, USA (1991), p. 89.

  7. N. N. Syutkin et al, 7th SMMIB: Abstracts. Washington, DC, USA (1991), p. 195.

  8. V. A. Ivchenko, N. N. Syutkin, and S. I. Paramonov, 40th IFES: Abstracts. Nagoya, Jpn. (1993), p. 107.

  9. V. A. Ivchenko and N. N. Syutkin, Fiz. Met. Metalloved.,61, No. 3, 575–582 (1986).

    Google Scholar 

  10. S. I. Belyuk et al, Proceedings of the Second Conference on Electron-Beam Technologies/ELT88, Varna (1988), pp. 159–164.

  11. N. V. Gavrilov et al., Pis'ma Zh. Éksp. Teor. Fiz.,14, No. 10, 864–869 (1988).

    Google Scholar 

  12. N. V. Gavrilov et al, Proceedings of the Seventh All-Union Symposium on High-Current Electronics, Pt. II, Tomsk (1988), pp. 192–194.

  13. V. A. Ivchenko and N. N. Syutkin, Fiz. Tverd. Tela,25, No. 10, 3049–3054 (1983).

    Google Scholar 

  14. H. N. Southworth and B. Ralph, Phil. Mag.,21, 23–41 (1970).

    Google Scholar 

  15. V. A. Ivchenko, N. N. Syutkin, and L. Yu. Kuznetsova, 34th IFES: Abstracts. Osaka, Jpn. (1987), p. 54.

  16. V. A. Ivchenko and N. N. Syutkin, Fiz. Met. Metalloved.52, No. 3, 552–557 (1981).

    Google Scholar 

  17. V. A. Ivchenko, N. N. Syutkin, and E. F. Talantsev, Fiz. Met. Metalloved.,69, No. 2, 121–127 (1990).

    Google Scholar 

  18. V. A. Ivchenko, N. N. Syutkin and L. Yu. Kuznetsova, Fiz. Met. Metalloved.,64, No. 1, 162–169 (1987).

    Google Scholar 

  19. J. Mayer, L. Ericson and J. Davis, Ion Doping of Semiconductors [Russian translation], Mir, Moscow (1973), p. 296.

    Google Scholar 

  20. P. V. Pavlov et al, Phys. Stat. Sol. (a),94, 395–401 (1986).

    Google Scholar 

  21. P. V. Pavlov, V. D. Skupov, and D. I. Tetel'baum, Fiz. Khim. Obrabot. Materialov, No. 6, 19–24 (1987).

  22. A. D. Pogrebnyak et al, Izv. Vyssh. Uchebn. Zaved. Fiz., No. 1, 57–65 (1987).

  23. V. A. Ivchenko, N. N. Syutkin, and L. Yu. Kuznetsova, 34th IFES: Abstracts. Osaka, Jpn. (1987), p. 53.

  24. F. M. Kam'ya, The Pulsed Theory of Heat Conduction [in Russian], Énergiya, Moscow (1972), p. 272.

    Google Scholar 

  25. M. L. Jenkins, K.-H. Katerban, and M. Wilkens, Phil. Mag.34, No. 6, 1141–1154 (1976).

    Google Scholar 

  26. M. L. Jenkins and M. Wilkens, Phil. Mag.,34, No. 6, 1155–1168 (1976).

    Google Scholar 

  27. G. A. English and M. L. Jenkins, J. Nucl. Mater.,96, 341–357 (1981).

    Google Scholar 

  28. R. I. Taunt and B. Ralph, Phil. Mag.,30, 1379–1394 (1974).

    Google Scholar 

  29. M. A. Fortes, D. A. Smith, and B. Ralph, Phil. Mag.,17, 169–176 (1968).

    Google Scholar 

  30. Yu. G. Abov et al, Preprint ITEF, No. 81, Moscow (1985), p. 51.

  31. P. R. Okamoto and L. E. Rehn, J. Nucl. Mater.,83, No. 1, 2–23 (1979).

    Google Scholar 

  32. N. N. Syutkin et al., Fiz. Met. Metalloved.,62, No. 5, 965–969 (1986).

    Google Scholar 

  33. N. N. Syutkin et al., Fiz. Met. Metalloved.,60, No. 3, 607–612 (1985).

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Additional information

Translated from Izvestiya Vysshikh Uchebnykh Zavedenii. Fizika, No. 5, pp. 41–58, May, 1994.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Syutkin, N.N., Ivchenko, V.A. Field ion microscopy of ion-implanted alloys. Russ Phys J 37, 437–451 (1994). https://doi.org/10.1007/BF00560114

Download citation

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00560114

Keywords

Navigation