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Determining the static factor in films with a strain gradient by an x-ray diffraction method

  • Physics Of Semiconductors And Dielectrics
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Russian Physics Journal Aims and scope

Abstract

Graphical dependences allowing the static-factor parameters to be found from the angular distance between the maxima on the reflection curve are obtained on the basis of the model of a crystal with constant strain gradient in the kinematic approximation of x-ray diffraction theory. X-ray diffraction and theoretical data for the static factor are given for film samples of the solid solution InGaP/(111)GaAs and an autoepitaxial Si/(111) film with boron diffusion.

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References

  1. Yu. P. Khapachev and F. N. Chukhovskii, Kristallografiya,34, No. 3, 776–801 (1989).

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  2. V. V. Lider, F. N. Chukhovskii, Yu. P. Khapachev, and M. N. Barashev, Fiz. Tverd. Tela,31, No. 4, 74–81 (1989).

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  3. V. V. Lider and Yu. P. Khapachev, in: 2nd Conference on Dynamic X-Ray Scattering in Crystals with Dynamic and Static Distortion: Abstracts of Proceedings [in Russian], Kiev (1990), p. 99.

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Kabardino-Balkarsk State University. Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 6, pp. 52–54, June, 1993.

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Lider, V.V., Khapachev, Y.P. & Dyshekov, A.A. Determining the static factor in films with a strain gradient by an x-ray diffraction method. Russ Phys J 36, 552–554 (1993). https://doi.org/10.1007/BF00559451

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  • DOI: https://doi.org/10.1007/BF00559451

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