Skip to main content
Log in

Ion sputtering and its biomedical applications. Theoretical concepts and practical consequences. Clinical implications and potential use

  • Review
  • Published:
Journal of Materials Science Aims and scope Submit manuscript

Abstract

It is the purpose of the paper to promote the ion beam sputtering technique and its biomedical applications among not only ion beam users but also other research workers, and especially, among biologists and medical doctors. The objectives of this article are threefold. Firstly, it supplies a conceptual background for discussing the main question of this work, i.e. biomedical applications of sputtering. Secondly, the title issue and some related problems, important in the biomedical use, are widely presented and discussed. Finally, clinical implication and potential applications are shown.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. L. Holland, W. Steckelmacher andJ. Yardwood (editors), “Vacuum Manual” (E and FN Spon, London, 1974) p. 370.

    Google Scholar 

  2. P. Sigmund, in “Topics in Applied Physics”, Vol. 1, edited by R. Behrish (Springer, Berlin, 1981) pp. 9–71.

    Google Scholar 

  3. G. Betz andG. K. Wehner,ibid.in Vol. 2.

    Google Scholar 

  4. O. Almen andG. Bruce,Nucl. Instr. Methods 11 (1961) 257.

    Google Scholar 

  5. N. Laegreid andG. K. Wehner,J. Appl. Phys. 32 (1961) 365.

    Google Scholar 

  6. D. Rosenberg andG. K. Wehner,ibid. 33 (1962) 1842.

    Google Scholar 

  7. K. B. Cheney andE. T. Pitkin,ibid. 36 (1965) 3542.

    Google Scholar 

  8. H. M. Windawi,Surf. Sci. 55 (1976) 573.

    Google Scholar 

  9. E. P. Vaulin, N. E. Georgeva andT. P. Martynenko,Solid State Phys. 19 (1977) 1423.

    Google Scholar 

  10. R. V. Stuart andG. K. Wehner,J. Appl. Phys. 33 (1962) 2345.

    Google Scholar 

  11. I. N. Evdokimov andV. A. Molchanov,Can. J. Phys. 46 (1968) 779.

    Google Scholar 

  12. P. Sigmund,Phys. Rev. 184 (1969) 383.

    Google Scholar 

  13. H. H. Andersen andH. L. Bay,Radiat. Effects 19 (1973) 139.

    Google Scholar 

  14. J. S. Colligon, C. M. Hicks andA. P. Neokleous,ibid. 18 (1973) 119.

    Google Scholar 

  15. E. S. Mashkova andV. A. Molchanov,ibid. 18 (1973) 283.

    Google Scholar 

  16. H. H. Andersen andH. L. Bay,J. Appl. Phys. 46 (1975) 2416.

    Google Scholar 

  17. E. P. Eer Nisse,Appl. Phys. Lett. 29 (1976) 14.

    Google Scholar 

  18. M. J. Witcomb,Radiat. Effects 27 (1976) 223.

    Google Scholar 

  19. Idem, ibid. 32 (1977) 205.

    Google Scholar 

  20. J. S. Colligon andM. H. Patel,ibid. 32 (1977) 193.

    Google Scholar 

  21. F. Vasiliu andS. Frunza,Rev. Roum. Phys. 22 (1977) 601.

    Google Scholar 

  22. Z. W. Kowalski,J. Mater. Sci. 16 (1981) 3512.

    Google Scholar 

  23. Idem, Polish Patent No. 121162 (1983).

  24. Y. Yamamura, N. Matsunami andN. Itoh,Radiat. Effects 71 (1983) 65.

    Google Scholar 

  25. Y. Yamamura, Proceedings of the Intenational Ion Engineering Congress — ISIAT'83 and IPAT'83, Kyoto 1983 p. 1875.

  26. H. H. Andersen andH. L. Bay, in “Topics in Applied Physics”, Vol.1, edited by R. Behrish (Springer, Berlin, 1981) pp. 145–218.

    Google Scholar 

  27. H. E. Roosendall,ibid.in pp. 219–256.

    Google Scholar 

  28. R. Kelly,Radiat. Effects 80 (1984) 273.

    Google Scholar 

  29. P. Sigmund,Rev. Roum. Phys. 17 (1972) 823.

    Google Scholar 

  30. Idem, ibid. 17 (1972) 969.

    Google Scholar 

  31. Idem, ibid. 17 (1972) 1079.

    Google Scholar 

  32. Idem, J. Mater Sci. 8 (1973) 1545.

    Google Scholar 

  33. M. T. Robinson, in “Topics in Applied Physics”, Vol. 1, edited by R. Behrish (Springer, Berlin, 1981) pp. 73–144.

    Google Scholar 

  34. M. J. Nobes,Nucl. Instr. Methods 170 (1980) 371.

    Google Scholar 

  35. G. Carter, J. S. Colligon andM. J. Nobes,Radiat. Effects 31 (1977) 65.

    Google Scholar 

  36. A. R. Bayly,J. Mater. Sci. 7 (1972) 404.

    Google Scholar 

  37. A. D. G. Steward andM. W. Thompson,ibid. 4 (1969) 56.

    Google Scholar 

  38. D. J. Barber, F. C. Frank, M. Moss, J. W. Steeds andI. S. T. Tsong,ibid. 8 (1973) 1030.

    Google Scholar 

  39. M. J. Nobes, J. S. Colligon andG. Carter,ibid. 4 (1969) 730.

    Google Scholar 

  40. G. Carter, J. S. Colligon andM. J. Nobes,ibid. 6 (1971) 115.

    Google Scholar 

  41. Idem, ibid. 8 (1973) 1473.

    Google Scholar 

  42. J. P. Ducommun, M. Cantagrel andM. Marchal,ibid. 9 (1974) 725.

    Google Scholar 

  43. J. P. Ducommun, M. Cantagrel andM. Moulin,ibid. 10 (1975) 52.

    Google Scholar 

  44. N. Hermanne andA. Art,Radiat. Effects 5 (1970) 203.

    Google Scholar 

  45. N. Hermanne,ibid. 19 (1973) 161.

    Google Scholar 

  46. R. S. Nelson andD. J. Mazey,ibid. 18 (1973) 127.

    Google Scholar 

  47. I. W. Rangełow,J. Vac. Sci. Technol. A1 (1983) 410.

    Google Scholar 

  48. S. M. Rossnagel andR. S. Robinson,ibid. 1 (1983) 426.

    Google Scholar 

  49. I. H. Wilson,Radiat. Effects 18 (1973) 95.

    Google Scholar 

  50. A. R. Bayly andP. D. Townsend,J. Phys. D: Appl. Phys. 5 (1972) L103.

    Google Scholar 

  51. N. Bibić, T. Nenadović, andB. Perović, Proceedings of the 7th International Vacuum Congress, 3rd International Conference on Solid Surface, Vienna 1977, p. 1485.

  52. R. S. Dhariwal andR. K. Fitch,J. Mater. Sci. 12 (1977) 1225.

    Google Scholar 

  53. W. R. Hudson,J. Vac. Sci. Technol. 14 (1977) 286.

    Google Scholar 

  54. J. L. Whitton,Radiat. Effects 32 (1977) 129.

    Google Scholar 

  55. D. J. Barber,Beitr. Elektronenmikrosk. Dir. Oberfl. 5 (1972) 585.

    Google Scholar 

  56. D. J. Mazey, R. S. Nelson andP. A. Thackery,J. Mater. Sci. 3 (1968) 26.

    Google Scholar 

  57. I. H. Wilson andM. W. Kidd,ibid. 6 (1971) 1362.

    Google Scholar 

  58. M. Navez, C. Sella andD. Chaperot, Colloques Internationaux CNRS, Bellevue, December, 1962, p. 233.

  59. M. Tarasevich,Appl. Opt. 9 (1970) 173.

    Google Scholar 

  60. M. Lukaszewicz andZ. W. Kowalski,J. Mater. Sci. 16 (1981) 302.

    Google Scholar 

  61. H. J. Mathieu andD. Landolt,Appl. Surf. Sci. 3 (1979) 348.

    Google Scholar 

  62. T. Koshikawa, K. Goto, N. Saeki, R. Shimizu andE. Sugata,Surf. Sci. 79 (1979) 461.

    Google Scholar 

  63. P. S. Ho, J. E. Lewis andW. K. Chu,ibid. 85 (1979) 19.

    Google Scholar 

  64. G. Betz,ibid. 92 (1980) 283.

    Google Scholar 

  65. R. Kelly,ibid. 100 (1980) 85.

    Google Scholar 

  66. G. Betz, J. Dudonis andP. Braun,ibid. 104 (1981) L185.

    Google Scholar 

  67. H. H. Andersen,J. Vac. Sci. Technol. 16 (1979) 770.

    Google Scholar 

  68. J. E. Lewis andP. S. Ho,ibid. 16 (1979) 772.

    Google Scholar 

  69. H. G. Tompkins,ibid. 16 (1979) 778.

    Google Scholar 

  70. P. H. Holloway andG. C. Nelson,ibid. 16 (1979) 793.

    Google Scholar 

  71. P. Sigmund,ibid. 17 (1980) 396.

    Google Scholar 

  72. G. Betz, M. Arias andP. Braun,Nucl. Instr. Methods 170 (1980) 347.

    Google Scholar 

  73. G. Betz, M. Opitz andP. Braun,ibid. 182/183 (1981) 63.

    Google Scholar 

  74. G. K. Wehner,J. Vac. Sci. Technol. A1 (1983) 487.

    Google Scholar 

  75. Z. W. Kowalski,ibid. 1 (1983) 494.

    Google Scholar 

  76. A. A. Predvoditelev andN. V. Opekunov,Fiz. Chim. Obrabot. Mater. 5 (1977) 44.

    Google Scholar 

  77. S. A. Schwarz andC. R. Helms,J. Vac. Sci. Technol. 16 (1979) 781.

    Google Scholar 

  78. J. Delafond, S. T. Picraux andJ. A. Knapp,Appl. Phys. Lett. 38 (1981) 237.

    Google Scholar 

  79. W. Farber, G. Betz andP. Braun,Nucl. Instr. Methods 132 (1976) 351.

    Google Scholar 

  80. P. S. Ho, J. E. Lewis andJ. K. Howard,J. Vac. Sci. Technol. 14 (1977) 322.

    Google Scholar 

  81. H. J. Mathieu andD. Landolt,Surf. Sci. 53 (1975) 228.

    Google Scholar 

  82. F. Garbassi andG. Parravano,ibid. 71 (1978) 42.

    Google Scholar 

  83. W. K. Chu, J. K. Howard andR. F. Lever,J. Appl. Phys. 47 (1976) 4500.

    Google Scholar 

  84. A. Jablonski, S. H. Overbury andG. A. Somorjai,Surf. Sci. 65 (1977) 578.

    Google Scholar 

  85. P. S. Ho, J. E. Lewis, H. S. Wildman andJ. K. Howard,ibid. 57 (1976) 393.

    Google Scholar 

  86. K. Goto, T. Koshikawa, K. Ishikawa andR. Shimizu,J. Vac. Sci. Technol. 15 (1978) 1695.

    Google Scholar 

  87. H. Shimizu, M. Ono andK. Nakayama,Surf. Sci. 36 (1973) 817.

    Google Scholar 

  88. M. Opitz, G. Betz andP. Braun, Proceedings of the 4th International Conference on Solid Surface and 3rd European Conference on Surface Science, Cannes, 1980, p. 1225.

  89. M. Opitz, Thesis, University of Technology, Vienna (1979).

    Google Scholar 

  90. S. Berglund andG. A. Somorjai,J. Chem. Phys. 59 (1973) 5537.

    Google Scholar 

  91. F. J. Kujers, B. M. Tieman andV. Ponec,Surf. Sci. 75 (1978) 657.

    Google Scholar 

  92. G. C. Nelson,J. Vac. Sci. Technol. 13 (1976) 974.

    Google Scholar 

  93. H. H. Andersen, F. Besenbacher andP. Goddiksen, Proceedings of the Symposium on Sputtering, Perchtoldsdorf, Vienna, 1980, p. 446.

  94. Z. L. Liau, W. L. Brown, R. Homer andJ. M. Poate,Appl. Phys. Lett. 30 (1977) 626.

    Google Scholar 

  95. N. S. Mcintyre andF. W. Stanchell,J. Vac. Sci. Technol. 16 (1979) 798.

    Google Scholar 

  96. G. J. Slusser andN. Winograd,Surf. Sci. 84 (1979) 211.

    Google Scholar 

  97. M. Opitz, G. Betz andP. Braun,Acta Physica Acad. Sci. Hungarica 49 (1980) 119.

    Google Scholar 

  98. S. H. Overbury andG. A. Somorjai,J. Chem. Phys. 66 (1977) 3181.

    Google Scholar 

  99. Y. Taga andK. Nakajima,Trans. Jp. Inst. Met. 18 (1977) 535.

    Google Scholar 

  100. A. Van Oostrom,J. Vac. Sci. Technol. 13 (1976) 224.

    Google Scholar 

  101. I. L. Singer, J. S. Murday andL. R. Cooper,ibid. 15 (1978) 725.

    Google Scholar 

  102. G. E. McGuire,Surf. Sci. 76 (1978) 130.

    Google Scholar 

  103. R. Bouwman, L. H. Toneman andA. A. Holscher,ibid. 35 (1973) 8.

    Google Scholar 

  104. M. Mohri, K. Watanabe andT. Yamashina,J. Nucl. Mater. 75 (1978) 7.

    Google Scholar 

  105. G. K. Wehner, “The Aspects of Sputtering in Surface Analysis Methods” in “Methods of Surface Analysis”, edited by A. W. Czanderna (Elsevier, Amsterdam, Oxford, New York, 1975) Chap. 1, p. 5.

    Google Scholar 

  106. E. taglauer andW. Heiland, Proceedings of the Symposium on Sputtering, Perchtoldsdorf, Vienna (1980) p. 423.

  107. C. C. Chang, B. Schwartz andS. P. Murarka,J. Electrochem. Soc. 124 (1977) 922.

    Google Scholar 

  108. G. K. Wehner,Jpn. J. Appl. Phys. Suppl. 2 (1974) 495.

    Google Scholar 

  109. H. C. Feng andJ. M. Chen,J. Phys. C7 (1974) L75.

    Google Scholar 

  110. S. Thomas, R. J. Mattox,J. Electrochem. Soc. 124 (1977) 1942.

    Google Scholar 

  111. E. Taglauer andW. Heiland,Appl. Phys. Lett. 33 (1978) 950.

    Google Scholar 

  112. H. J. Mathieu, J. B. Matheiu, D. E. McClure andD. Landolt,J. Vac. Sci. Technol. 14 (1977) 1023.

    Google Scholar 

  113. S. Thomas,Surf. Sci. 55 (1976) 754.

    Google Scholar 

  114. K. Jacobi andW. Ranke,J. Electron Spectrosc. 8 (1976) 225.

    Google Scholar 

  115. K. S. Kim, W. E. Baitinger, J. W. Amy andN. Winograd,J. Electron Spectrosc. Relat. Phenom. 5 (1974) 351.

    Google Scholar 

  116. R. Holm andS. Storp,Appl. Phys. 12 (1977) 101.

    Google Scholar 

  117. L. Yin, T. Tsang andI. Adler,Geochim. Cosmochim. Acta Suppl. 7 (1976) 891.

    Google Scholar 

  118. T. J. Chuang, C. R. Brundle andK. Wandelt,Thin Solid Films 53 (1978) 19.

    Google Scholar 

  119. N. S. Mcintyre andD. G. Zetaruk,Anal. Chem. 49 (1977) 1521.

    Google Scholar 

  120. T. J. Chuang, C. R. Brundle andD. W. Rice,Surf. Sci. 59 (1976) 413.

    Google Scholar 

  121. Y. Umezawa andC. N. Reilly,Anal. Chem. 50 (1978) 1290.

    Google Scholar 

  122. G. J. Coyle, T. Tsang, I. Adler andL. Yin,J. Electron Spectrosc. Relat. Phenom. 16 (1979) 389.

    Google Scholar 

  123. N. S. Mcintyre andD. G. Zetaruk,J. Vac. Sci. Technol. 14 (1977) 181.

    Google Scholar 

  124. T. Tsang, G. J. Coyle, I. Adler andL. Yin,J. Electron Spectrosc. Relat. Phenom. 16 (1979) 389.

    Google Scholar 

  125. L. I. Yin, S. Ghose andI. Adler,Appl. Spectrosc. 26 (1972) 355.

    Google Scholar 

  126. C. R. Brundle, T. J. Chuang andK. Wandelt,Surf. Sci. 68 (1977) 459.

    Google Scholar 

  127. K. S. Kim andN. Winogard,ibid. 43 (1974) 625.

    Google Scholar 

  128. K. S. Kim, W. E. Baitinger andN. Winograd,ibid. 55 (1976) 285.

    Google Scholar 

  129. E. Görlich, J. Haber, A. Stoch andJ. Stoch,J. Solid State Chem. 33 (1980) 121.

    Google Scholar 

  130. G. C. Nelson,J. Vac. Sci. Technol. 15 (1978) 702.

    Google Scholar 

  131. A. Katrib,J. Electron Spectrosc. Relat. Phenom. 18 (1980) 275.

    Google Scholar 

  132. J. Roth, Proceedings on the Symposium on Sputtering, Perchtoldsdorf, Vienna (1980) p. 773.

  133. J. Roth, J. Bohdansky andA. P. Martinelli,Radiat. Effects 48 (1980) 213.

    Google Scholar 

  134. L. L. Tongson, J. V. Biggers, G. O. Dayton, J. M. Bind andB. E. Knox,J. Vac. Sci. Technol. 15 (1978) 1133.

    Google Scholar 

  135. P. N. Ross, J. R. Stonehart andP. Stonehart,J. Catal. 39 (1975) 298.

    Google Scholar 

  136. A. Turos, W. F. Van Der Weg, D. Sigurd andJ. W. Mayer,J. Appl. Phys. 45 (1974) 2777.

    Google Scholar 

  137. J. Tardy, J. Pivot, J. P. Dupin andA. Cachard, Proceedings of the 7th International Vacuum Congress and 3rd Internation Conference on Solid Surfaces, Vienna, (1977) p. 1481.

  138. J. L. Whitton, G. Scørensen andJ. S. Williams,Nucl. Inst. Methods 149 (1978) 743.

    Google Scholar 

  139. Z. L. Liau andJ. W. Mayer,J. Vac. Sci. Technol. 15 (1978) 1629.

    Google Scholar 

  140. J. M. Poate, W. L. Brown, R. Homer, W. M. Augustyniak, J. W. Mayer, K. N. Tu andW. F. Van Der Weg,Nucl. Instr. Methods 132 (1976) 345.

    Google Scholar 

  141. Z. L. Liau, J. W. Mayer, W. L. Brown andJ. M. Poate,J. Appl. Phys. 49 (1978) 5295.

    Google Scholar 

  142. D. K. Murti, R. Kelly, Z. L. Liau andJ. M. Poate,Surf. Sci. 81 (1979) 571.

    Google Scholar 

  143. H. L. Garvin, Symposium on Sputtering, Rochester, NY, 1969 p. 1.

  144. P. R. Stuart, J. S. Osborn andS. M. Lewis,Vac. 19 (1969) 503.

    Google Scholar 

  145. M. Spector, L. C. Burns andS. L. Kimzey,Nat. 247 (1974) 61.

    Google Scholar 

  146. G. M. Hodges, M. D. Muir, C. Sella andA. J. P. Carteaud,J. Microsc. 95 (1972) 445.

    Google Scholar 

  147. I. Bendet andN. Rizk,Biophys. J. 16 (1976) 357.

    Google Scholar 

  148. S. N. Ghafouri, R. K. Fitch andP. C. Ball,Vac. 31 (1981) 33.

    Google Scholar 

  149. B. A. Banks, A. J. Weigand, Ch. A. Babbush andC. L. Van Kampen, NASA TM X-73512. (1976) p. 1.

  150. B. A. Banks, NASA TM 81721 (1981) p. 1.

  151. Z. W. Kowalski,Probl. Technol. Med. XII (1981) 259.

    Google Scholar 

  152. Idem, ibid. XIII (1982) 47.

    Google Scholar 

  153. Idem, Scientific Papers IET Technical University of Wrocław No. 26, Monographs No. 9 (1982) 1.

    Google Scholar 

  154. Idem, J. Mater. Sci. 18 (1983) 2531.

    Google Scholar 

  155. Z. W. Kowalski, J. Martan andJ. Zdanowski, Reports of IET Technical University of Wrocław, Report No. 12/SPR, Wrocław, 1981.

  156. A. J. Weigand andB. A. Banks,J. Vac. Sci. Technol. 14 (1977) 326.

    Google Scholar 

  157. A. J. Weigand, NASA TM 78851 (1978) p. 1.

  158. Z. W. Kowalski,J. Mater. Sci. 17 (1982) 2599.

    Google Scholar 

  159. Z. W. Kowalski andI. W. Rangelow,ibid. 18 (1983) 741.

    Google Scholar 

  160. I. W. Rangelow andZ. W. Kowalski, Beitr. elektronenmikrosk. Dir. Oberfl.15 (1982) 27.

    Google Scholar 

  161. H. Kato, H. Mizuno, K. Tamura, S. Watanabe, Y. Shimizu, T. Teramatsu, Y. Kitamura andM. Hirabayashi,Artif. Organs 5 Suppl. (1981) 493.

    Google Scholar 

  162. H. Kato, T. Nakamura, H. Mizuno, S. Matsunobe, K. Tamura, S. Watanabe, Y. Shimizu andT. Teramatsu,Jpn. J. Artif. Organs 11 (1982) 983.

    Google Scholar 

  163. Z. W. Kowalski,J. Mater. Sci. 17 (1982) 1627.

    Google Scholar 

  164. Idem, Mater. Sci. VIII, No. 1–4 (1982) 85.

    Google Scholar 

  165. Idem, “Ceramic Surfaces and Surface Treatments”, edited by R. Morrell and M. G. Nicholas (British Ceramic Society, Stoke-on-Trent, 1984) pp. 77–87.

    Google Scholar 

  166. M. Lukaszewicz andW. Hauffe, Scientific Papers IET Technical University of Wrocław No. 24, Conferences No. 4 (1980) p. 234.

    Google Scholar 

  167. Z. W. Kowalski,J. Mater. Sci. 19 (1984) 2845.

    Google Scholar 

  168. I. A. Teodorescu andF. Vasiliu,Radiat. Effects 15 (1972) 101.

    Google Scholar 

  169. W. R. Hudson, R. R. Robson andJ. S. Sovey, NASA TM X-3517 (1977) p. 1.

  170. R. S. Robinson, NASA CR-159567 (1979) p. 1.

  171. H. R. Kaufman andR. S. Robinson,J. Vac. Sci. Technol. 16 (1979) 175.

    Google Scholar 

  172. R. S. Robinson andS. M. Rossnagel,ibid. 21 (1982) 790.

    Google Scholar 

  173. R. S. Berg andG. J. Kominiak,ibid. 13 (1976) 403.

    Google Scholar 

  174. A. J. Weigand, M. L. Meyer andJ. S. Ling, NASA TM X-3553 (1977) p. 1.

  175. A. J. Weigand andM. A. Cenkus, NASA TM-79245 (1979) p. 1.

  176. D. W. Dwight andB. R. Beck,Org. Coatings Plast. Prepr. 40 (1979) 494.

    Google Scholar 

  177. G. J. Picha, NASA CR 159817 (1980) p. 1.

  178. E. G. Wintucky, M. Christopher, E. Bahnuik andS. Wang, NASA TM 81747 (1981) p. 1.

  179. A. J. Weigand,J. Vac. Sci. Technol. 15 (1978) 718.

    Google Scholar 

  180. H. Wolf, K. Domasch, H. J. Brauer andA. Voigt,Biomater. 4 (1983) 289.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Rights and permissions

Reprints and permissions

About this article

Cite this article

Kowalski, Z.W. Ion sputtering and its biomedical applications. Theoretical concepts and practical consequences. Clinical implications and potential use. J Mater Sci 20, 1521–1555 (1985). https://doi.org/10.1007/BF00555259

Download citation

  • Received:

  • Accepted:

  • Issue Date:

  • DOI: https://doi.org/10.1007/BF00555259

Keywords

Navigation