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Journal of Materials Science

, Volume 27, Issue 1, pp 255–262 | Cite as

Preparation of SiBx and SiB6 plates by chemical vapour deposition of SiCl4 + B2H6 system

  • Masakazu Mukaida
  • Takashi Goto
  • Toshio Hirai
Papers

Abstract

SiBx and SiB6 plates were prepared by chemical vapour deposition (CVD) using SiCl4, B2H6 and H2 gases under the conditions of deposition temperatures (Tdep) from 1323–1773 K, total gas pressures (Ptot) from 4–40 kPa and B/Si source gas ratio (mB/Si=2B2H6/SiCl4) from 0.2–2.8. The effects of CVD conditions on the morphology, structure and composition of the deposits were examined. High-purity and high-density SiBx and SiB6 plates about 1 mm thick were obtained at the deposition rates of 71 and 47 nm s−1, respectively. The lattice parameter, composition and density of CVD SiBx plates were dependent on their non-stoichiometry. The lattice parameter,a, was 0.6325 nm, butc ranged from 1.262–1.271 nm.The B/Si atomic ratio ranged from 3.1–5.0, and the density ranged from 2.39–2.45×103 kg m−3. The CVD SiB6 plates showed constant values of lattice parameters (a=1.444 nm,b=1.828 nm,c=0.9915 nm), composition (B/Si=6.0) and density (2.42×103 kg m−3), independent of CVD conditions.

Keywords

Polymer Chemical Vapour Deposition Vapour Deposition Deposition Rate Chemical Vapour 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Chapman & Hall 1992

Authors and Affiliations

  • Masakazu Mukaida
    • 1
  • Takashi Goto
    • 1
  • Toshio Hirai
    • 1
  1. 1.Institute for Materials ResearchTohoku UniversitySendaiJapan

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