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Dissolution slowness surfaces of cubic crystals

Part II Applications to class 23 and to combined etching and lithography techniques

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Abstract

Procedures are developed to derive the etching shapes encountered in conventional crystal etching and in localized crystal dissolution. These procedures are used to predict the shapes produced on class 23 crystals. Problems of practical importance in photolithography techniques, such as the extent of the underetch, the bordering angle and the etched shape of star-like structures, are studied. In some cases the results are compared with those obtained from geometrical constructions based on Wulff's procedure.

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Authors and Affiliations

  1. Laboratoire de Chronométrie, Electronique et Piézoélectricité, Ecole Nationale Superieure de Mecanique et des Microtechniques, Route de Gray, La Bouloie, 25030, Besancon Cedex, France

    C. R. Tellier, J. Y. Amaudrut & A. Brahim-Bounab

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  1. C. R. Tellier
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  2. J. Y. Amaudrut
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  3. A. Brahim-Bounab
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Tellier, C.R., Amaudrut, J.Y. & Brahim-Bounab, A. Dissolution slowness surfaces of cubic crystals. J Mater Sci 26, 5595–5607 (1991). https://doi.org/10.1007/BF00553663

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  • DOI: https://doi.org/10.1007/BF00553663

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