Abstract
The range of composition over which co-sputtered alloys in the W-Ti-Si system are deposited in the amorphous state has been determined. Alloys are found to be crystalline only if they contain less than ∼ 10% Si and this is associated with the presence of terminal solid solutions in the respective binary phase diagrams. The stability of W-Si amorphous alloys was examined using differential scanning calorimetry and X-ray diffraction. The most stable glasses exist in the range 10 to 30% Si and about the WSi2 composition. There is some correlation between increasing stability and increasing activation energy for crystallization.
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Ball, R.K., Freeman, W.G., Taylor, A.J. et al. Amorphous phase formation and stability in W-Ti-Si metallization materials. J Mater Sci 21, 4029–4034 (1986). https://doi.org/10.1007/BF00553464
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DOI: https://doi.org/10.1007/BF00553464