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Strained surface layers of quartz plates produced by lapping and polishing and their influence on quartz resonator performance

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Abstract

The strained surface layers of AT-cut quartz plates produced by lapping and polishing have been studied using the X-ray double crystal method. In addition, the influence of surface strain on the characteristics of quartz resonators has been investigated. Experimental results from X-ray double crystal measurements indicate that a residual stress layer in the lapped and polished surface is created and that the quartz resonator performance is also affected.

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Authors and Affiliations

  1. Department of Micromechanics, Faculty of Engineering, The University of Tokyo, 7-3-1, Hongo, Bunkyo-Ku, Tokyo, Japan

    Y. Sekiguchi & H. Funakubo

Authors
  1. Y. Sekiguchi
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  2. H. Funakubo
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Sekiguchi, Y., Funakubo, H. Strained surface layers of quartz plates produced by lapping and polishing and their influence on quartz resonator performance. J Mater Sci 15, 3066–3070 (1980). https://doi.org/10.1007/BF00550377

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  • DOI: https://doi.org/10.1007/BF00550377

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