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Review: Image contrast in the scanning electron microscope

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Abstract

Already the scanning electron microscope is used extensively in the fields of materials science and the life sciences, but it is still being rapidly developed. This paper is an up-to-date review of the types of contrast that can be detected and of the mechanisms that give rise to them. The effect of the type of collector and display system used is discussed together with the possibility of improving the images to show enhanced contrast.

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References

  1. O. Johari (ed.) Proceedings of the First Annual Scanning Electron Microscopy Symposium, Illinois Institute of Technology, 1968.

  2. O. Johari (ed.) Proceedings of the Second Annual Scanning Electron Microscopy Symposium, Illinois Institute of Technology, 1969.

  3. C. W. Oatley, W. C. Nixon, and R. F. W. Pease, “Advances in Electronics and Electron Physics” 21 (1965) 181.

    Google Scholar 

  4. W. C. Nixon, Contemp. Phys. 10 (1969) 71.

    Google Scholar 

  5. T. E. Everhart, Ph.D. Thesis, University of Cambridge.

  6. N. C. Macdonald, Appl. Phys. Lett. 16 (1970) 76.

    Google Scholar 

  7. P. Auger, J. Phys. Radium 6 (1925) 205.

    Google Scholar 

  8. E. H. S. Burhop, “The Auger Effect and other Radiationless Transitions” (University Press, Cam- bridge 1952).

    Google Scholar 

  9. L. A. Harris, J. Appl. Phys. 39 (1968) 1419.

    Google Scholar 

  10. D. Mcmullan, Ph.D. Thesis, University of Cambridge.

  11. T. E. Everhart, O. C. Wells, and C. W. Oatley, J. Electronics and Control 7 (1959) 97.

    Google Scholar 

  12. H. Bruining “Physics and Applications of Second- ary Emission” (Pergamon Press, London, 1954).

    Google Scholar 

  13. A. Becker, Ann. Phys. 2 (1929) 249.

    Google Scholar 

  14. E. J. Sternglass and M. M. Wachtel, Phys. Rev. 99 (1955) 646.

    Google Scholar 

  15. O. C. Wells, Ph.D. Thesis, University of Cambridge.

  16. P. C. R. Palluel, C.R. Acad. Sci. 224 (1947) 1492; 1551.

    Google Scholar 

  17. E. J. Sternglass, Phys. Rev. 95 (1954) 345.

    Google Scholar 

  18. H. E. Bishop, Ph.D. Thesis, University of Cambridge.

  19. T. E. Everhart and C. W. Oatley, J. Electronics 2 (1956) 568.

    Google Scholar 

  20. G. V. Spivak, G. V. Saparin, B. Massarari, and M. V. Bikov, Proceedings of the third Regional Conference on Electron Microscopy, Prague, 1964.

  21. S. Kimoto and H. Hashimoto, 26th Electron Microscope Society of America Meeting, 1968.

  22. D. C. Joy and J. P. Jakubovics, Phil. Mag. 17 (1968) 61.

    Google Scholar 

  23. idem, Brit. J. Appl. Phys. 2 (1969) 1367.

    Google Scholar 

  24. J. R. Dorsey, First National Conference on Electron probe micro-analysis, College Park, Maryland, 1966.

  25. V. N. Vertsner, Bull. Acad. Sci. (USSR) 30 (1966) 806.

    Google Scholar 

  26. J. R. Banbury and W. C. Nixon, J. Sci. Instr. 44 (1967) 889.

    Google Scholar 

  27. F. Kulin, Acta. Met. 2 (1954) 354.

    Google Scholar 

  28. W. T. Read, Phil. Mag. 45 (1954) 775.

    Google Scholar 

  29. J. J. Lander, H. Schreiber, T. M. Buck, and J. R. Matthews, Appl. Phys. Lett 3 (1963) 206.

    Google Scholar 

  30. W. Czaja and G. H. Wheatley, J. Appl. Phys. 35 (1964) 2782.

    Google Scholar 

  31. W. Czaja and J. R. Patel, ibid 36 (1965) 1476.

    Google Scholar 

  32. W. Czaja, ibid 37 (1966) 918.

    Google Scholar 

  33. H. F. Matare and C. W. Laakso, ibid 40 (1969) 476.

    Google Scholar 

  34. Idem, Appl. Phys. Lett. 13 (1968) 216.

    Google Scholar 

  35. A. M. B. Shaw, Ph.D. Thesis, University of Cambridge.

  36. D. G. Coates, Phil. Mag. 16 (1967) 1179.

    Google Scholar 

  37. Idem, (1969) in reference 2.

  38. E. D. Wolf and T. E. Everhart, (1969) in reference 2.

  39. D. B. Holt, J. Gavrilovic, and M. P. Jones, J. Mater. Sci. 3 (1968) 553.

    Google Scholar 

  40. G. R. Booker, A. M. B. Shaw, M. J. Whelan, and P. B. Hirsch, Phil. Mag. 16 (1967) 1185.

    Google Scholar 

  41. P. B. Hirsch, A. Howie and M. J. Whelan, ibid 7 (1962) 2095.

    Google Scholar 

  42. P. Duncumb, ibid 2101.

    Google Scholar 

  43. A. M. B. Shaw, G. R. Booker, and D. G. Coates, J. Sci. Instr. 2 (1969) 243.

    Google Scholar 

  44. E. M. Schulson and C. G. Van Essen, ibid 247.

    Google Scholar 

  45. E. M. Schulson, ibid 361.

    Google Scholar 

  46. V. E. Cosslett and R. N. Thomas, Brit. J. Appl. Phys. 15 (1964) 883.

    Google Scholar 

  47. Idem, ibid 1283.

    Google Scholar 

  48. A. V. Crewe, (1969) in reference 2.

  49. J. M. Cowley, Appl. Phys. Lett. 15 (1969) 58.

    Google Scholar 

  50. S. Kimoto and H. Hashimoto, (1968) in reference 1.

  51. A. V. Crewe, J. Wall, and L. M. Welter, J. Appl. Phys. 39 (1968) 5861.

    Google Scholar 

  52. P. M. Williams and A. D. Yoffe, Nature 221 (1969) 952.

    Google Scholar 

  53. Idem, Phil. Mag. 18 (1968) 555.

    Google Scholar 

  54. P. R. Thornton, “Scanning Electron Microscopy” (Chapman and Hall, London, 1968).

    Google Scholar 

  55. Idem, “The Physics of Electro-Iuminescent Devices” (Span, London, 1967).

    Google Scholar 

  56. D. A. Shaw and P. R. Thornton, J. Mater. Sci. 3 (1968) 507.

    Google Scholar 

  57. P. R. Thornton, D. V. Sulway, and D. A. Shaw, IEEE Trans. Electron Devices ED16 (1969) 360.

    Google Scholar 

  58. J. B. Johnson and K. G. Mckay, Phys. Rev. 93 (1953) 668.

    Google Scholar 

  59. A. J. Dekker, ibid, 94 (1954) 1179.

    Google Scholar 

  60. D. R. Clarke, C. T. H. Stoddart, and C. J. Robbie, J. Mater. Sci. 5 (1970) 364.

    Google Scholar 

  61. D. R. Clarke and P. R. Stuart, to be published in J. Sci. Instr.

  62. J. R. Banbury and W. C. Nixon, J. Sci. Instr. 2 (1969) 1055.

    Google Scholar 

  63. A. Speth, Rev. Sci. Instr. 40 (1969).

  64. T. E. Everhart, Proc. IEEE 54 (1966) 1480.

    Google Scholar 

  65. D. B. Wittry and A. Van Couvering, J. Sci. Instr. 44 (1967) 294.

    Google Scholar 

  66. T. H. P. Chang and W. C. Nixon, J. Roy. Micros. Soc. 88 (1968) 143.

    Google Scholar 

  67. J. P. Flemming, J. Sci. Instr. 2 (1969) 93.

    Google Scholar 

  68. J. P. Flemming and E. W. Ward, Third Annual Scanning Electron Microscopy Symposium, 1970, to be presented.

  69. C. W. Oatley, J. Sci. Instr. 2 (1969) 429.

    Google Scholar 

  70. Cambridge Scientific Instrument's “Stereoscan”.

  71. M. G. R. Thomson and A. V. Crewe, 26th Annual Electron Microscope Society of America meeting, 1968, p. 358.

  72. R. Simon, (1969) in reference 2.

  73. G. S. Plows and W. C. Nixon, J. Sci. Instr. 45 (1968) 595.

    Google Scholar 

  74. N. C. Macdonald, G. Y. Robinson, and R. M. White, J. Appl. Phys. 40 (1969) 4516.

    Google Scholar 

  75. D. R. Clarke, P. R. Breakwell, and G. D. Sims, NPL report IMS II.

  76. D. Pugh, to be published.

  77. W. Mahieu, Air Force Materials Laboratory report (1968), AFML-TR-68-113.

  78. D. R. Clarke and G. D. Sims, unpublished work

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  1. Division of Inorganic and Metallic Structure, National Physical Laboratory, Teddington, Middlesex, UK

    D. R. Clarke

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  1. D. R. Clarke
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At present on leave of absence at the Cavendish Laboratory, Cambridge

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Clarke, D.R. Review: Image contrast in the scanning electron microscope. J Mater Sci 5, 689–708 (1970). https://doi.org/10.1007/BF00549753

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