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Analytical and graphical evaluation of local quasi-stable angular points during ion bombardment at oblique incidence

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Abstract

An implied analytical condition, connecting the incidence angles θ o and θ e between the two intersecting microfacet normals and the ion beam direction, has been inferred for the existence of local quasi-stable intersections (angular points) during ion erosion. This condition, which can also be deduced on the basis of the erosion slowness curve, leads to a higher degree algebraic equation with a parameter, applicable for any dependence S=S (θ), expressed as an algebraic polynomial expression in cos θ. A new graphical method for evaluation of orientations θ e compatible with a given orientation θ o, based on a known polar diagram cursor-type, has also been proposed.

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Author notes

  1. F. Vasiliu

    Present address: Institute for Physics and Technology of Materials, PO Box MG-07, R-76900, Bucharest-Magurele, Romania

Authors and Affiliations

  1. National Institute for Scientific and Technical Creation, Bulev, Pacii, Number 220, Section 6, PO Box 16, Code 77538, Bucharest, Romania

    F. Vasiliu

  2. Institute for Physics and Technology of Materials, PO Box MG-07, R-76900, Bucharest-Magurele, Romania

    S. Frunza

Authors
  1. F. Vasiliu
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  2. S. Frunza
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Vasiliu, F., Frunza, S. Analytical and graphical evaluation of local quasi-stable angular points during ion bombardment at oblique incidence. J Mater Sci 18, 3562–3570 (1983). https://doi.org/10.1007/BF00540728

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  • DOI: https://doi.org/10.1007/BF00540728

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