Abstract
The micromechanics of indentation-induced flaws in monocrystalline silicon have been studied in relation to strength determination. In the first part, the evolution of the deformation-fracture pattern during contact with a Vickers pyramid is described. Emphasis is thereby placed on the vital role of the residual component of the elastic-plastic contact field in driving the cracks. In the second part, the response of the cracks in subsequent strength testing is followed. A precursor stage of stable growth is observed prior to attaining a failure configuration, consistent with augmentation of the applied tensile (flexural) loading by the residual contact component. No detectable slow crack growth due to environmental influence is found. Nevertheless, silicon is revealed as a material of extreme susceptibility to brittle fracture, with significant strength degradation from contacts on the microscale. The relevance of this brittleness to the mechanical behaviour of silicon components as a function of fabrication and prospective service conditions is discussed.
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Lawn, B.R., Marshall, D.B. & Chantikul, P. Mechanics of strength-degrading contact flaws in silicon. J Mater Sci 16, 1769–1775 (1981). https://doi.org/10.1007/BF00540623
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DOI: https://doi.org/10.1007/BF00540623