Abstract
The kinetics and structure of chemical vapour-phase deposition of boron nitride ceramics on a graphite matrix from the mixture BCl3/NH3/N2 have been investigated for a wide range of conditions (temperature 1300–2100°C, pressure 130–2600 Pa, at varying partial pressures of the components). The growth-rate was found to vary non-linearly with the consumption rates of the reagents. The content of hexagonal components in the BN-ceramics rose, while the turbostrate microphase content diminished with temperature. The dependences of the concentrations of hexagonal, turbostratic and amorphous fractions in BN-ceramics on the reaction mixture composition and total pressure have been determined.
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Rozenberg, A.S., Sinenko, Y.A. & Chukanov, N.V. Regularities of pyrolytic boron nitride coating formation on a graphite matrix. JOURNAL OF MATERIALS SCIENCE 28, 5528–5533 (1993). https://doi.org/10.1007/BF00367825
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DOI: https://doi.org/10.1007/BF00367825