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Preparation and characterization of PLZT thin films by sol-gel processing

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Abstract

The effect of acid catalysts on the sol-gel preparation of ferroelectric lead lanthanum zirconium titanate (PLZT) thin films was studied. High quality thin films were successfully produced by using suitable amounts of the drying control chemical additive formamide and also catalyst acids during the sol-gel processing followed by various annealing conditions. The dielectric constants of the PLZT (8/65/35) thin films produced in this study varied between 540 (100 kHz) for a film annealed at 600 °C for 30 mins to a maximum 870 °C (1 kHz), 700 (100 kHz) for a film annealed at 650 °C for 20 mins.

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Authors and Affiliations

  1. Department of Electronics Engineering and Institute of Electronics, National Chiao-Tung University, Hsinchu, 30042, Taiwan, Republic of China

    Yu -Fu Kuo & Tseung -Yuen Tseng

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  1. Yu -Fu Kuo
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  2. Tseung -Yuen Tseng
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Kuo, Y.F., Tseng, T.Y. Preparation and characterization of PLZT thin films by sol-gel processing. JOURNAL OF MATERIALS SCIENCE 31, 6361–6368 (1996). https://doi.org/10.1007/BF00354461

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  • DOI: https://doi.org/10.1007/BF00354461

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