Abstract
This paper determines the optimum range of total ion current for a cesium liquid metal ion source for use as a focused ion beam (FIB). This range is determined from a figure of merit calculated from measurements of the angular intensity and energy spread of emitted ions. Judging from both the figure of merit and the tail of the energy distribution curves, the total emission current should be set near 1 μA for a cesium FIB with a high current density. Assuming that both Cs- and Ga-FIBs have the same diameter, the relative current density of a Cs-FIB is expected to be approximately 80% that of a Ga-FIB.
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References
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