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Excimer laser processing of embedded fibers

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Abstract

Novel aspects of the excimer laser etching of nanostructures in embedded optical fibers are discussed. Emphasis is put on the etching of a specified hole geometry and on excellent surface quality of the hole walls.

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Authors and Affiliations

  1. Department of Electrical and Computer Engineering, Rice University, 77251-1892, Houston, TX, USA

    M. W. Sigrist & F. K. Tittel

Authors
  1. M. W. Sigrist
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  2. F. K. Tittel
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On leave from: Institute of Quantum Electronics, ETH, CH-8093 Zürich, Switzerland

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Sigrist, M.W., Tittel, F.K. Excimer laser processing of embedded fibers. Appl. Phys. A 52, 418–420 (1991). https://doi.org/10.1007/BF00323652

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  • DOI: https://doi.org/10.1007/BF00323652

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