Summary
Germanium-containing polymers were formed from tetramethylgermanium by glow discharge polymerization at 20 kHz frequency. The formed polymers that were filmy or powdery depending on operational conditions were mixtures of polymers consisting of CH3, CH2, Ge-CH3, Ge-O-C and Ge-O-Ge groups, and germanium metal. Most Ge species present at the outermost layers of the films were oxided, and the Ge species at the inner layers existed still as Ge metal. There was no significant discrepancy in chemical structure between polymers formed at 20 kHz and at 13.56 MHz discharge frequency.
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Inagaki, N., Mitsuuchi, M. Glow discharge polymerization of tetramethylgermanium in capacitive coupling system at 20 kHz frequency. Polymer Bulletin 9, 390–395 (1983). https://doi.org/10.1007/BF00265318
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DOI: https://doi.org/10.1007/BF00265318