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Ion implantation to improve mechanical and electrical properties of resistive materials based on ruthenium dioxide

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Abstract

This paper reports the influence of ion implantation, using different chemical species, on the surface micromorphology, wear resistance, coefficient of friction and electrical resistivity, and its variation during friction for resistive materials based on ruthenium dioxide. It is demonstrated that nitrogen and hydrogen ions are the most effective for modifying surface properties.

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Byeli, A.V., Shykh, S.K. & Beresina, V.P. Ion implantation to improve mechanical and electrical properties of resistive materials based on ruthenium dioxide. J Mater Sci: Mater Electron 7, 419–422 (1996). https://doi.org/10.1007/BF00180779

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  • DOI: https://doi.org/10.1007/BF00180779

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