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Microsystem Technologies

, Volume 24, Issue 8, pp 3299–3305 | Cite as

Experimental study of gamma radiation induced degradation of a piezoresistive pressure sensor

  • Vinod Belwanshi
  • Sebin Philip
  • Anita Topkar
Technical Paper

Abstract

This paper reports the experimental investigation of gamma radiation induced degradation of a piezoresistive pressure sensor with total dose exposure up to ~ 40 Mrad. The output response of a piezoresistive pressure sensor and the magnitude of piezoresistors constituting the Wheatstone bridge were measured at various total doses after exposure to gamma radiation using a Cobalt-60 source. The bridge piezoresistor magnitudes did not show any change after irradiation up to a total dose of 40 Mrad. However, the pressure sensor exhibited a significant degradation in the performance in terms of reduced sensitivity and linearity after the exposure to 10 Mrad. The pressure sensor demonstrated a decrease of response by about 75% beyond the gamma dose of 30 Mrad. Additionally, a small increase in the offset voltage and increased hysteresis in the pressure response were also observed.

Notes

Acknowledgements

The authors would like to thank Dr. M. S. Kulkarni and Mr. Sachin G. Mhatre for their support in providing the Cobalt-60 gamma irradiation facility for the irradiation of the pressure sensor.

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Copyright information

© Springer-Verlag GmbH Germany, part of Springer Nature 2018

Authors and Affiliations

  1. 1.Electronics DivisionBhabha Atomic Research CentreMumbaiIndia
  2. 2.Homi Bhabha National InstituteMumbaiIndia

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