Abstract
We demonstrate the effect of plasma ignition on the growth temperature decrease of single-walled carbon nanotubes (SWNTs) by using a plasma-coupled hybrid chemical-vapor-deposition system. The horizontal reactor is divided into the plasma ignition region and the SWNT synthesis region. The plasma was generated by using an inductively-coupled system and contributed to efficient decomposition of the feedstock gas. The growth temperature for the SWNTs was suppressed to 500 ◦ C at a plasma power of 400 W with a mixture of C2H4 and H2 gases. The result of optical emission spectroscopy showed H2, Hβ, and CH lines with relatively weak intensities favorable for low-temperature growth of SWNTs.
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Acknowledgments
This research was supported by the Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the Ministry of Education (Grant No. 2018R1D1A1B07048870).
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Jo, SI., Lee, BJ. & Jeong, GH. Effect of Plasma Ignition on the Growth Temperature Decrease of Single-Walled Carbon Nanotubes in a Plasma-Coupled Hybrid Chemical-Vapor-Deposition System. J. Korean Phys. Soc. 76, 1110–1115 (2020). https://doi.org/10.3938/jkps.76.1110
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DOI: https://doi.org/10.3938/jkps.76.1110