Abstract
The design of microcavity for single quantum dot based emitters is developed. The microcavity consists of semiconductor distributed Bragg reflector and microlens fabricated by selective oxidation of gradient Al\({}_{x}\)Ga\({}_{1-x}\)As layer. The microcavity design provides a high external quantum efficiency of radiation extraction (up to 70\(\%\)) and a high efficiency of radiation input into an optical fiber. The microcavity can be used to create emitters of single photons and emitters of entangled photon pairs based on single semiconductor quantum dots.
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This work was supported by the Russian Science Foundation, project no. 18-72-10056.
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Derebezov, I.A., Gaisler, A.V., Mironov, A.Y. et al. Microcavity for Single Quantum Dot Based Emitters. Optoelectron.Instrument.Proc. 57, 521–525 (2021). https://doi.org/10.3103/S8756699021050034
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DOI: https://doi.org/10.3103/S8756699021050034