Abstract
We studied the physical principles of creating 3D microstructures using the method of femtosecond two-photon photopolymerization. We present 3D microstructures of complex topology and demonstrate a wide range of optical applications: elements of photonic integrated circuits, a new generation of micro-optical devices, elements of X-ray optics, and devices with single-photon sources.
Similar content being viewed by others
REFERENCES
Satoshi, K., Hong-Bo, S., Tomokazu, T., and Kenji, T., Nature, 2001, vol. 412, p. 697.
Pao, Y.H. and Rentzepis, P.M., Appl. Phys. Lett., 1965, vol. 6, no. 5, p. 93.
Thiele, S., Arzenbacher, K., Gissibl, T., et al., Sci. Adv., 2017, vol. 3, no. 2, p. e1602655.
Shcherbakov, D.A., Kolymagin, D.A., Matital, R.P., et al., J. Russ. Laser Res., 2023, vol. 44, p. 47.
Vitukhnovsky, A.G., Zvagelsky, R.D., Kolymagin, D.A., et al., Opt. Spectrosc., 2019, vol. 126, p. 54.
Gehring, H., Eich, A., and Schuck, C., Pernicew, Opt. Lett., 2019, vol. 44, p. 5089.
Vitukhnovsky, A.G., Zvagelsky, R.D., Kolymagin, D.A., et al., Bull. Russ. Acad. Sci.: Phys., 2020, vol. 84, p. 760.
Lindenmann, N., Dottermusch, S., Goedecke, M., et al., J. Lightwave Technol., 2015, vol. 33, no. 4, p. 755.
Schumann, M., Buckmann, T., Gruhler, N., et al., Light: Sci. Appl., 2014, vol. 3, no. 6.
Kurtsiefer, C., Mayer, S., Zarda, P., and Weinfurter, H., Phys. Rev. Lett., 2000, vol. 85, p. 290.
Jelezko, F. and Wrachtrup, J., Phys. Status Solidi A, 2006, vol. 203, p. 3207.
Aharonovich, I., Castelletto, S., Simpson, D.A., et al., Rep. Prog. Phys., 2011, vol. 74, p. 076501.
Barclay, P.E., Santori, C., Fu, K.-M., Beausoleil, R.G., and Painter, O., Opt. Express, 2009, vol. 17, p. 8081.
Hausmann, B.J.M., Shields, B., Quan, Q., et al., Nano Lett., 2012, vol. 12, p. 1578.
Wolters, J., Schell, A.W., Kewe, G., et al., Appl. Phys. Lett., 2010, vol. 97, p. 141108.
Van der Sar, T., Hagemeier, J., Pfaff, W., et al., Appl. Phys. Lett., 2011, vol. 98, p. 193103.
Riedrich-Möller, J., Kipfstuhl, L., Hepp, C., et al., Nat. Nano, 2012, vol. 7, p. 69.
Fu, K.-M.C., Santori, C., Barclay, P.E., et al., Appl. Phys. Lett., 2008, vol. 93, p. 234107.
Schröder, T., Schell, A. W., Kewes, G., Aichele, T., and Benson, O., Nano Lett., 2011, vol. 11, p. 198.
Schröder, T., Fujiwara, M. Noda, T., et al., Opt. Express, 2012, vol. 20, p. 10490.
Henderson, M.R., Gibson, B.C., Ebendorff-Heidepriem, H., et al, Adv. Mater., 2011, vol. 23, p. 2772.
Schell, A.W., Kaschke, J., Fischer, J., et al., Sci. Rep., 2013, vol. 3, p. 1577.
Matital, R.P., Kolymagin, D.A., Chubich, D.A., Merkushev, D.D., and Vitukhnovsky, A.G., J. Sci.: Adv. Mater. Devices, 2022, vol. 7, no. 2, p. 100413.
Egorov, A.E., Kolymagin, D., Vitukhnovsky, A., et al., Polymers, 2023, vol. 15, no. 1, p. 71.
Gritsienko, A.V., Duleba, A.I., Vitukhnovsky, A.G., et al., Nanomaterials, 2022, vol. 2, no. 24, p. 4495.
Pisarenko, A.V., Zvagelsky, R.D., Kolymagin, D.A., Katanchiev, B.V., Vitukhnovsky, A.G., and Chubich, D.A., Optik, 2020, vol. 201, p. 163350.
Zhiganshina, E.R., Arsenyev, M.V., Chubich, D.A., Kolymagin, D.A., Pisarenko, A.V., Burkatovsky, D.S., and Chesnokov, S.A., Eur. Polym. J., 2022, vol. 162, p. 110917.
Sharipova, M.I., Baluyan, T.G., Abrashitova, K.A., Kulagin, G.E., Petrov, A.K., Chizhov, A.S., Shatalova, T.B., Chubich, D.A., Kolymagin, D.A., Vitukhnovsky, A.G., Bessonov, V.O., and Fedyanin, A.A., Opt. Mater. Express, 2021, vol. 11, p. 371.
Funding
Research of microoptical devices—arrays of microlenses were carried out with the support of the Russian Science Foundation (project no. 22-79-10153.) Research related to X-ray optics was carried out with the financial support of the Ministry of Science and Higher Education of the Russian Federation, scientific project 15.SIN.21.0008 (Agreement no. 075-11-2021-086). The development of a single-beam optical 3D lithography system that overcomes diffraction limit is carried out in accordance with the Agreement on the provision of subsidies from the federal budget no. 075-02-2022-1672. The creation and study of 3D microstructures in combination with sources of single (Fock) photons and optical cavities was supported by the Russian Science Foundation (project no. 22-19-00324).
Author information
Authors and Affiliations
Corresponding author
Ethics declarations
The authors declare that they have no conflicts of interest.
Additional information
Publisher’s Note.
Pleiades Publishing remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.
About this article
Cite this article
Vitukhnovsky, A.G., Kolymagin, D.A., Gritsienko, A.V. et al. Femtosecond Two-Photon Photopolymerization—Creating 3D Microstructures for Optical Applications. Bull. Russ. Acad. Sci. Phys. 87 (Suppl 1), S87–S92 (2023). https://doi.org/10.3103/S1062873823704452
Received:
Revised:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.3103/S1062873823704452