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In Situ and Ex Situ Spectrophotometric Characterization of Single- and Multilayer-Coatings II: Experimental Technique and Application Examples

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Optical Characterization of Thin Solid Films

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 64))

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Abstract

In the previous chapter, the theoretical background for characterization of single layer and multilayer coatings has been outlined. In this chapter, important aspects for the underlying experimental techniques will presented. Furthermore, we demonstrate the application of different dispersion models for characterization of uncoated substrates, single layer coatings of dielectrics, semiconductors, metals and organic coatings. Thereby, the focus has been set to the \( \beta \_{\text{do}} \) model. Finally, the interplay of in situ and ex situ spectroscopy will be demonstrated for a multilayer antireflection coating (V-coating).

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Author information

Authors and Affiliations

  1. Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Str. 7, 07745, Jena, Germany

    Steffen Wilbrandt

  2. Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Albert-Einstein-Str. 7, 07745, Jena, Germany

    Olaf Stenzel

  3. Abbe School of Photonics, Friedrich-Schiller-University Jena, Albert-Einstein-Straße 6, 07745, Jena, Germany

    Olaf Stenzel

Authors
  1. Steffen Wilbrandt
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  2. Olaf Stenzel
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Correspondence to Steffen Wilbrandt .

Editor information

Editors and Affiliations

  1. Abbe School of Photonics, Friedrich-Schiller-University Jena, Jena, Thüringen, Germany

    Olaf Stenzel

  2. Institute of Physical Engineering, Brno University of Technology, Brno, Czech Republic

    Miloslav Ohlídal

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Wilbrandt, S., Stenzel, O. (2018). In Situ and Ex Situ Spectrophotometric Characterization of Single- and Multilayer-Coatings II: Experimental Technique and Application Examples. In: Stenzel, O., Ohlídal, M. (eds) Optical Characterization of Thin Solid Films. Springer Series in Surface Sciences, vol 64. Springer, Cham. https://doi.org/10.1007/978-3-319-75325-6_8

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