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Morphology and Structural Parameters of Three-Dimensional Structures Created Using STED Nanolithography

  • Proceedings of the XII International Scientific School-Seminar “Fundamental Research and Innovation: Nanooptics, Photonics, and Coherent Spectroscopy”
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Bulletin of the Russian Academy of Sciences: Physics Aims and scope

Abstract

An original technique is presented for obtaining 3D nanostructures with the use of femtosecond two-photon photopolymerization and additional photopolimerization quenching STED nanolitography. The effect the degree of polymerization of the pentaerythritol tetraacrylate photoresist in combination with the 7-diethylamino-3-thenoylcoumarin photoinitiator (PETTA + DETC) has on its local mechanical properties is studied for photo- and thermopolymerized samples. Ways are proposed for measuring the degree of monomer conversion from IR-absorption spectra when comparing the hardness of the obtained polymer via atomic force microscopy, and for improving the mechanical properties of 3D nanostructures obtained via STED nanolitography with post-baking post-processing.

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Authors and Affiliations

  1. Moscow Institute of Physics and Technology (State University), Dolgoprudny, Moscow oblast, 141700, Russia

    D. A. Chubich, D. A. Kolymagin, I. A. Kazakov & A. G. Vitukhnovsky

  2. Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 119991, Russia

    A. G. Vitukhnovsky

Authors
  1. D. A. Chubich
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  2. D. A. Kolymagin
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  3. I. A. Kazakov
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  4. A. G. Vitukhnovsky
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Corresponding author

Correspondence to D. A. Chubich.

Additional information

Original Russian Text © D.A. Chubich, D.A. Kolymagin, I.A. Kazakov, A.G. Vitukhnovsky, 2018, published in Izvestiya Rossiiskoi Akademii Nauk, Seriya Fizicheskaya, 2018, Vol. 82, No. 8, pp. 1117–1122.

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Chubich, D.A., Kolymagin, D.A., Kazakov, I.A. et al. Morphology and Structural Parameters of Three-Dimensional Structures Created Using STED Nanolithography. Bull. Russ. Acad. Sci. Phys. 82, 1012–1017 (2018). https://doi.org/10.3103/S1062873818080154

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  • DOI: https://doi.org/10.3103/S1062873818080154

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