Abstract
The paper presents the developed electromechanical model of RR-type MEMS gyro, which takes into consideration nonlinear effects and discrepancy of characteristics of the actuator and angular sensor. The reasons of resonance peaks at subfrequencies during the platform vibrations are analyzed, and performance requirements for the components of control system are formulated.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Peshekhonov, V.G., Gyroscopic navigation systems: Current status and prospects, Gyroscopy and Navigation, 2011, no. 3, pp. 111–118.
Xie, H. and Fedder, G.K., Integrated microelectromechanical gyroscopes, Journal of Aerospace Engineering, 2003, vol. 17, no. 2, pp. 65–75.
Tuzov, A., MEMS motion measurement sensors. Part 2. High-precision inertial sensors, Elektronika, 2011, no. 1, pp. 2–5.
Evstifeev, M.I. and Chelpanov, I.B., Improving mechanical performance of MEMS gyros, Gyroscopy and Navigation, 2013, no. 3, pp. 174–180.
Weinberg, H., Gyro mechanical performance: The most important parameter, Technical Article MS-2158, Analog Devices, Inc., September 2011, pp. 1–5.
Evstifeev, M.I., Eliseev, D.P., Kovalev, A.S., and Rozentsvein, D.V., Results of MEMS gyro mechanical tests, Gyroscopy and Navigation, 2011, no. 3, pp. 119–125.
Evstifeev, M.I., Eliseev, D.P., and Kovalev, A.S., Analysis of electromechanical model of RR-type MEMS gyro, Materialy XXVIII konferentsii pamyati vydayushchegosya konstruktora giroskopicheskikh priborov N.N. Ostryakova (Proceedings of the 28th Conference in Memory of N.N. Ostryakov), St. Petersburg: Elektropribor, 2012.
Kovalev, A.S., Eliseev, D.P., and Belogurov, A.A., Analysis of refined mathematical model of RR-type MEMS gyro subjected to linear vibrations, Giroskopiya i Navigatsiya, 2012, no. 2, pp. 167.
Evstifeev, M.I. et al., Studying the dynamics of MEMS gyro under mechanical effects, Nauchno-tekhnicheskii vestnik SPbGU ITMO, 2011, no. 4, pp. 72–76.
Belyaeva, T.A. and Nekrasov, Ya.A., Reducing the quadrature error in RR-type MEMS gyro using the electrodes above the comb zone, Giroskopiya i Navigatsiya, 2008, no. 1, pp. 82–90.
Geen, J.; Analog Devices, U.S. Patent 2005/0139005 A1. Micromachined Sensor with Quadrature Suppression, Jun.30, 2005.
Kuang, J., and Geen, J., Analog Devices, U.S. Patent 8266961, Inertial Sensors with Reduced Sensitivity to Quadrature Errors and Micromachining Inaccuracies, Sep. 18, 2012.
Kovalev, A.S. and Logovskaya, E.V., Methods to reduce the effect of MEMS gyro design parameter spread on its performance, Materialy X konferentsii molodykh uchenykh “Navigatsiya i Upravlenie Dvizheniem” (Proceedings of the 10th Conference of Young Scientists “Navigation and Motion Control”), 2009, pp. 362–369.
Evstifeev, M.I., Problems of calculating and designing MEMS gyros, Giroskopiya i Navigatsiya, 2004, no. 1, pp. 27–39.
Evstifeev, M.I., Rozentsvein, D,V., and Chelpanov, I.B., Analyzing the mechanical performance of MEMS gyro elastic suspensions, Gyroskopia i Navigatsiya, 2009, no. 3, pp. 22–34.
Author information
Authors and Affiliations
Corresponding author
Additional information
Published in Giroskopiya i Navigatsiya, 2013, No. 3, pp. 24–32.
Rights and permissions
About this article
Cite this article
Evstifeev, M.I., Kovalev, A.S. & Eliseev, D.P. Electromechanical model of RR-Type MEMS gyro with consideration for the platform vibrations. Gyroscopy Navig. 5, 174–180 (2014). https://doi.org/10.1134/S2075108714030043
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S2075108714030043