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Nonlinear calibration curves in secondary ion mass spectrometry for quantitative analysis of gesi heterostructures with nanoclusters

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Abstract

For the first time in the practice of secondary ion mass spectrometry, we obtained a nonlinear calibration curve for the ratio of the cluster and elementary secondary ions of germanium Ge2/Ge without secondary ions of silicon, which enables the quantification of germanium in Ge x Si1–x heterostructures in the entire range of 0 < x ≤ 1. We developed a method for quantitative lateral analysis based on the plotting of a lateral map of x. An algorithm to identify and analyze the lateral heterogeneity of x in Ge x Si1–x heterostructures with 3D clusters by comparing the results of depth profiling analysis, obtained using linear and nonlinear calibration curves, is developed, and concentration x in the self-assembled nanoislands is determined.

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Authors and Affiliations

  1. Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhny Novgorod, 603950, Russia

    M. N. Drozdov, Yu. N. Drozdov, A. V. Novikov, P. A. Yunin & D. V. Yurasov

  2. Lobachevsky State University of Nizhny Novgorod, Nizhny Novgorod, 603950, Russia

    M. N. Drozdov, Yu. N. Drozdov, A. V. Novikov, P. A. Yunin & D. V. Yurasov

Authors
  1. M. N. Drozdov
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  2. Yu. N. Drozdov
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  3. A. V. Novikov
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  4. P. A. Yunin
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  5. D. V. Yurasov
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Correspondence to M. N. Drozdov.

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Original Russian Text © M.N. Drozdov, Yu.N. Drozdov, A.V. Novikov, P.A. Yunin, D.V. Yurasov, 2016, published in Pis’ma v Zhurnal Tekhnicheskoi Fiziki, 2016, Vol. 42, No. 5, pp. 40–48.

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Drozdov, M.N., Drozdov, Y.N., Novikov, A.V. et al. Nonlinear calibration curves in secondary ion mass spectrometry for quantitative analysis of gesi heterostructures with nanoclusters. Tech. Phys. Lett. 42, 243–247 (2016). https://doi.org/10.1134/S1063785016030044

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  • DOI: https://doi.org/10.1134/S1063785016030044

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