Abstract
The results of applying the methods of scanning electron microscopy and electron-probe microanalysis (SEM–EPMA) in combination with etching of the surface of the microparticles with an ion beam to study the composition and internal structure of single microparticles of uranium tetrafluoride are presented. It is shown that the accuracy of analysis of relief samples can be significantly improved if their relief is preliminarily smoothed by an ion beam. The standard deviation in determining the uranium weight content in microparticles of uranium tetrafluoride after smoothing of their surface with an ion beam decreases from (6.1–8.7) to (1.3–2.7)%.
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Zhukov, A.V., Kuchkin, A.V., Babenko, A.S. et al. Improving the Accuracy of Determining the Elemental Composition of Uranium-Containing Microparticles by the Sem–Epma Method. J. Surf. Investig. 15, 52–58 (2021). https://doi.org/10.1134/S1027451021010183
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DOI: https://doi.org/10.1134/S1027451021010183