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Near-Field Defects Imaging in Thin DLC Coatings Using High-Frequency Scanning Acoustic Microscopy

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Abstract

A high-frequency scanning acoustic microscope (SAM) operating at 1–1.3 GHz was used to investigate subsurface defects in diamond-like carbon (DLC) films that were 2–3 μm thick. Because the wavelength of the longitudinal wave in the film was comparable to the film thickness, the acoustical images obtained were near-field images. To interpret the features in the acoustical images, a multidisciplinary approach was utilized through a combination of SAM with atomic force microscopy (AFM), a focused ion beam (FIB) technique, and optical microscopy. Simulations based on the rigorous theoretical approach better predict the depth of the defect than the ray optical approach. It is shown that scattering of the shear waves by subsurface defects is responsible for the acoustical contrast of the cavity.

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ACKNOWLEDGMENTS

We are grateful to Sofia Berezina for her help in conducting SAM imaging.

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Authors and Affiliations

  1. Scientific and Technological Center of Unique Instrumentation, Russian Academy of Sciences, 117342, Moscow, Russia

    P. V. Zinin, I. B. Kutuza & S. A. Titov

  2. School of Ocean and Earth Science and Technology, University of Hawaii, HI 96822, Honolulu, USA

    P. V. Zinin

  3. New Russian University, 105005, Moscow, Russia

    I. B. Kutuza

Authors
  1. P. V. Zinin
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  2. I. B. Kutuza
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  3. S. A. Titov
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Correspondence to P. V. Zinin, I. B. Kutuza or S. A. Titov.

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Zinin, P.V., Kutuza, I.B. & Titov, S.A. Near-Field Defects Imaging in Thin DLC Coatings Using High-Frequency Scanning Acoustic Microscopy. J. Surf. Investig. 12, 1285–1293 (2018). https://doi.org/10.1134/S1027451018050737

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  • DOI: https://doi.org/10.1134/S1027451018050737

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