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Monte Carlo Method in Scanning Electron Microscopy. 3. Modern Condition of the Problem

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Abstract

The applicability of the Monte Carlo method for modeling images obtained in a scanning electron microscope is assessed. It is shown that in the Monte Carlo method, it is impossible to take into account all the mechanisms of the interaction of electrons with matter that affect image formation. Modern random-number generators create an insufficient amount of random numbers necessary for modeling the scattering of electrons in matter. The time it takes to modeling images using contemporary personal computers is too long: it takes years of continuous computer operation. There is no evidence of correctness of the results of the Monte Carlo method when generating images. These factors prove the impossibility of using the Monte Carlo method to modeling the scattering of electrons in a solid, which is used in image formation in a scanning electron microscope.

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References

  1. L. Reimer, Scanning Electron Microscopy: Physics of Image Formation and Microanalysis, (Springer, New York, Berlin, Heidelberg, 1998).

    Book  Google Scholar 

  2. Scanning Microscopy for Nanotechnology. Techniques and Applications, Ed. by W. Zhou and Z. L. Wang (Springer, New York, 2007).

  3. International Technology Roadmap for Semiconductors. 2013 Edition. Metrology (2013).

  4. Yu. A. Novikov and A. V. Rakov, Meas. Tech. 42 (1), 20 (1999).

    Article  Google Scholar 

  5. M. T. Postek and A. E. Vladar, in Handbook of Silicon Semiconductor Metrology, Ed. by A. C. Diebold (Marcel Dekker, New York, Basel, 2001), p.295.

  6. V. P. Gavrilenko, V. A. Kalnov, Yu. A. Novikov, A. A. Orlikovsky, A. V. Rakov, P. A. Todua, K. A. Valiev, and E. N. Zhikharev, Proc. SPIE 7272, 727227–1 (2009). doi 10.1117/12.814062

    Article  Google Scholar 

  7. Yu. A. Novikov, Russ. Microelectron. 46 (1), 55 (2017).

    Article  Google Scholar 

  8. Y. G. Li, S. F. Mao, and Z. J. Ding, in Applications of Monte Carlo Method in Science and Engineering, Ed. by S. Mordechai (InTech, 2011), p.232.

  9. V. Stary, in Applications of Monte Carlo Method in Science and Engineering, Ed. by S. Mordechai (InTech, 2011), p.195.

  10. P. Zhang, H. Y. Wang, Y. G. Li, S. F. Mao, and Z. J. Ding, Scanning 34, 145 (2012).

    Article  Google Scholar 

  11. Y. G. Li, P. Zhang, and Z. J. Ding, Scanning 35, 127 (2013).

    Article  Google Scholar 

  12. Z. Ruan, M. Zhang, R. G. Zeng, Y. Ming, B. Da, S. F. Mao, and Z. J. Ding, Surf. Interface Anal. 46, 1296 (2014).

    Article  Google Scholar 

  13. J. S. Villarrubia, A. E. Vladar, B. Ming, R. J. Kline, D. F. Sunday, J. S. Chawla, and S. List, Ultramicroscopy 154, 15 (2015).

    Article  Google Scholar 

  14. Yu. A. Novikov, J. Surf. Invest. X-ray, Synchrotron Neutron Tech. 8, (6), 1244 (2014). doi: 10.1134/S1027451014060123

    Article  Google Scholar 

  15. Yu. A. Novikov, J. Surf. Invest. X-ray, Synchrotron Neutron Tech. 9 (3), 604 (2015). doi: 10.1134/S1027451015030325

    Article  Google Scholar 

  16. Yu. A. Novikov, Russ. Microelectron. 43 (4), 258 (2014). doi: 10.1134/S1063739714040076

    Article  Google Scholar 

  17. Yu. A. Novikov, Russ. Microelectron. 43 (6), 427 (2014). doi: 10.1134/S1063739714060079

    Article  Google Scholar 

  18. Yu. A. Novikov, Russ. Microelectron. 44 (4), 269 (2015). doi: 10.1134/S1063739715030075

    Article  Google Scholar 

  19. Yu. A. Novikov, Surf. Invest.: X-ray, Synchrotron Neutron Tech. 11 (4), 853 (2017). doi: 10.1134/S1027451017040243

    Article  Google Scholar 

  20. Yu. A. Novikov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 12 (1), 161 (2018) doi: 10.1134/S1027451018010317

    Article  Google Scholar 

  21. Yu. A. Novikov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 8 (4), 775 (2014). doi: 10.1134/S1027451014040296

    Article  Google Scholar 

  22. Yu. A. Novikov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 9 (3), 496 (2015). doi: 10.1134/S102745101503009X

    Article  Google Scholar 

  23. Yu. A. Novikov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 9 (5), 1060 (2015). doi: 10.1134/S1027451015050389

    Article  Google Scholar 

  24. Yu. A. Novikov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 10 (1), 221 (2016). doi: 10.1134/S1027451016010286

    Article  Google Scholar 

  25. Yu. A. Novikov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 10 (5), 892 (2016). doi: 10.1134/S1027451016050116

    Article  Google Scholar 

  26. Applications of Monte Carlo Method in Science and Engineering, Ed. by S. Mordechai (InTech, 2011).

  27. Yu. A. Novikov, Physics, Chemistry, and Mechanics of Surfaces, 11 (10), 1077 (1995).

    Google Scholar 

  28. K. A. Valiev, The Physics of Submicron Lithography, Plenum Press, New York, 1992.

    Book  Google Scholar 

  29. V. I. Goldanskii, Yu. A. Novikov, A. V. Rakov, and V. P. Shantarovich, Struct. Chem. 2, (135)343 (1991).

    Google Scholar 

  30. J.M. Jauch, F. Rohrlich, The theory of protons and electrons, 2 ed., Springer-Verlag, Berlin-Heidelberg-New York-London, 1980.

    Google Scholar 

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Authors and Affiliations

  1. A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow, 119991, Russia

    Yu. A. Novikov

  2. National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), Moscow, 115409, Russia

    Yu. A. Novikov

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  1. Yu. A. Novikov
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Correspondence to Yu. A. Novikov.

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Original Russian Text © Yu.A. Novikov, 2018, published in Poverkhnost’, 2018, No. 5.

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Novikov, Y.A. Monte Carlo Method in Scanning Electron Microscopy. 3. Modern Condition of the Problem. J. Surf. Investig. 12, 460–465 (2018). https://doi.org/10.1134/S1027451018030138

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