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Optical and electrical properties of synthetic single-crystal diamond under high-fluence ion irradiation

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Abstract

The modification of the (111) face of synthetic diamond under high-fluence (≥1018 ion/cm2) 30-keV Ar+ irradiation is studied experimentally. It is found that ion irradiation at room temperature results in the formation of a low-conductivity surface layer. Heat treatment when the target temperature is increased to 400°C results in a more than ten-fold exponential drop in the layer resistance, as compared to its value at room temperature. If the temperature of the irradiated diamond is increased from 30 to 400°C the layer resistance of the ion-induced conductive layer drops by more than two orders of magnitude to the level corresponding to the conductivity of graphite-like materials. The Raman spectra of the ion-induced conductive surface layer reflect the processes of structural disorder—sp 2-carbon ordering and strong changes in the optical transmittance of diamond after ion irradiation.

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Authors and Affiliations

  1. Moscow Aviation Institute (National Research University), Moscow, 125993, Russia

    A. M. Borisov & V. A. Kazakov

  2. State Scientific Centre Keldysh Research Center, Moscow, 125438, Russia

    V. A. Kazakov & E. A. Shmytkova

  3. Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, 119991, Russia

    E. S. Mashkova & M. A. Ovchinnikov

  4. Sobolev Institute of Geology and Mineralogy, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia

    Yu. N. Palyanov

  5. Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090, Russia

    V. P. Popov

Authors
  1. A. M. Borisov
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  2. V. A. Kazakov
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  3. E. S. Mashkova
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  4. M. A. Ovchinnikov
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  5. Yu. N. Palyanov
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  6. V. P. Popov
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  7. E. A. Shmytkova
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Corresponding author

Correspondence to A. M. Borisov.

Additional information

Original Russian Text © A.M. Borisov, V.A. Kazakov, E.S. Mashkova, M.A. Ovchinnikov, Yu.N. Palyanov, V.P. Popov, E.A. Shmytkova, 2017, published in Poverkhnost’, 2017, No. 6, pp. 49–55.

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Borisov, A.M., Kazakov, V.A., Mashkova, E.S. et al. Optical and electrical properties of synthetic single-crystal diamond under high-fluence ion irradiation. J. Surf. Investig. 11, 619–624 (2017). https://doi.org/10.1134/S1027451017030211

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  • DOI: https://doi.org/10.1134/S1027451017030211

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