Abstract
The domain structure of lithium-niobate thin films grown on Si(111) and Si(100) substrates coated with a native oxide layer with a thickness of no less than 2 nm is investigated by X-ray diffraction, scanning electron microscopy and piezoresponse force microscopy. The films are synthesized by the rf magnetron sputtering of a single-crystal lithium-niobate target. A high degree of grain orientation in the polycrystalline films is demonstrated. The piezoelectric coefficients d zz of the lithium-niobate films on Si(111) and Si(100) substrates are calculated from the measured dependences of the amplitude of the piezoresponse signal on the ac voltage applied between the cantilever tip and the substrate. Piezoelectric hysteresis loops are obtained in the remanent piezoelectric response regime
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References
O. D. Vol’pyan and A. I. Kuz’michev, Negative Refraction of Waves: Intoduction to the Physics and Technology of Electromagnetic Metamaterials, Ed. by G. M. Zverev (Avers, Moscow, 2012) [in Russian].
O. D. Vol’pyan, S. V. Shkatula, and M. D. Malinkovich, Oboronnyi Kompleks–Nauchno-Tekh. Prog. Ross., No. 4, 22 (2012).
R. S. Feigelson, J. Cryst. Growth 166, 1 (1996), doi 10.1016/0022-0248(95)00570-6
I. Tsukada and S. Higuchi, Jpn. J. Appl. Phys. 43, 5307 (2004), doi 10.1143/JJAP.43.5307
S. Y. Lee and R. S. Feigelson, J. Cryst. Growth 186, 594 (1998), doi 10.1016/S0022-0248(97)00593-9
O. D. Vol’pyan, A. I. Kuz’michev, Yu. A. Obod, and P. P. Yakovlev, in Proceedings of the XV International Conference “High Technology in Russian Industry: Materials and Devices of Functional Electronics and Microphotonics” and the 22nd International Symposium “Thin Films in Electronics” (Moscow, 2009), p.447.
D. A. Kiselev, A. L. Kholkin, A. A. Bogomolov, O. N. Sergeeva, E. Yu. Kaptelov, and I. P. Pronin, Tech. Phys. Lett. 34 (8), 646 (2008).
O. N. Sergeeva, A. A. Bogomolov, S. V. Senkevich, E. Yu. Kaptelov, I. P. Pronin, D. A. Kiselev, and A. L. Kholkin, Integr. Ferroelectr. 106, 94 (2009), doi 10.1080/10584580903217200
B. Gautier and V. Bornand, Thin Solid Films 515, 1592 (2006), doi 10.1016/j.tsf.2006.05.051
V. Bornand, B. Gautier, and Ph. Papet, Mater. Chem. Phys. 86, 1016 (2004).
R. N. Zhukov, D. A. Kiselev, M. D. Malinkovich, Yu. N. Parkhomenko, E. A. Vygovskaya, and O. V. Toropova, Izv. Vyssh. Uchebn. Zaved., Mater. Elektron. Tekh., No. 4, 12 (2011).
R. N. Zhukov, A. S. Bykov, D. A. Kiselev, M. D. Malinkovich, and Yu. N. Parkhomenko, J. Alloys Compd. 536, S336 (2014), doi 10.1016/j.jallcom.2013.01.116
D. A. Kiselev, R. N. Zhukov, A. S. Bykov, M. I. Voronova, K. D. Shcherbachev, M. D. Malinkovich, and Yu. N. Parkhomenko, Inorg. Mater. 50 (4), 419 (2014), doi 10.7868/S0002337X14040071
K. Ch. Chiu, T. H. Yang, and J. M. Wu, Nanotecnology 24, 225602 (2013), doi 10.1088/0957-4484/24/22/225602
M. P. Shaskol’skaya, Acoustic Crystals: Reference Book (Nauka, Moscow, 1982) [in Russian].
D. Mohanty, G. S. Chaubey, A. Yourdkhani, S. Adireddy, G. Caruntu, and J. B. Wiley, RSC Adv. 2, 1913 (2012), doi 10.1039/c2ra00628f
B. Gautier, J.-R. Duclere, and M. Guilloux-Viry, Appl. Surf. Sci. 217, 108 (2003), doi 10.1016/S0169-4332(03)00529-4
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Original Russian Text © D.A. Kiselev, R.N. Zhukov, S.V. Ksenich, I.V. Kubasov, A.A. Temirov, N.G. Timushkin, A.S. Bykov, M.D. Malinkovich, V.V. Shvartsman, D.C. Lupascu, Yu.N. Parkhomenko, 2016, published in Poverkhnost’, 2016, No. 7, pp. 74–80.
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Kiselev, D.A., Zhukov, R.N., Ksenich, S.V. et al. The effect of silicon-substrate orientation on the local piezoelectric characteristics of LiNbO3 films. J. Surf. Investig. 10, 742–747 (2016). https://doi.org/10.1134/S1027451016040091
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DOI: https://doi.org/10.1134/S1027451016040091