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The Role of the Substrate on Photophysical Properties of Highly Ordered 15R-SiC Thin Films

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A Correction to this article was published on 21 September 2018

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Abstract

We report on the structural optimization and photophysical properties of in situ RF-sputtered single crystalline 15R-SiC thin films deposited on various substrates (ZrO2, MgO, SiC, and Si). The role of the substrates on the structural, electronic, and photodynamic behavior of the grown films have been demonstrated using x-ray diffraction, photoluminescence (PL) and time-resolved photoluminescence spectroscopy. The appropriate bonding order and the presence of native oxide on the surface of the grown samples are confirmed by x-ray photoelectron spectroscopy measurement. A deep-blue PL emission has been observed corresponding to the Si-centered defects occurring in the native oxide. Deconvolution of the PL spectra manifested two decay mechanisms corresponding to the radiative recombination. The PL intensity and carrier lifetime were found to be substrate- dependent which may be ascribed to the variation in the trap-density of the films grown on different substrates.

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Change history

  • 21 September 2018

    The wrong issue and volume number are indicated on the published article. This article appears in Volume 47, Number 9.

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Authors and Affiliations

  1. Thin film Laboratory, Institute Instrumentation Centre, Indian Institute of Technology Roorkee, Roorkee, 247667, India

    Satyendra Mourya, Jyoti Jaiswal, Gaurav Malik & Ramesh Chandra

  2. Department of Electronics and Communication Engineering, Indian Institute of Technology Roorkee, Roorkee, 247667, India

    Satyendra Mourya &  Brijesh Kumar

Authors
  1. Satyendra Mourya
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  2. Jyoti Jaiswal
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  3. Gaurav Malik
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  4. Brijesh Kumar
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  5. Ramesh Chandra
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Correspondence to Ramesh Chandra.

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Mourya, S., Jaiswal, J., Malik, G. et al. The Role of the Substrate on Photophysical Properties of Highly Ordered 15R-SiC Thin Films. J. Electron. Mater. 47, 5259–5268 (2018). https://doi.org/10.1007/s11664-018-6411-6

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