Abstract
The effect of high-power ion-beam irradiation on thin metal (Al, Cu, Cr) films of varying (0.08–1.9 µm) thickness deposited onto dielectric sodium silicate glass and glass-ceramic substrates is investigated. The strong effect of the ion current density and film thickness on the surface morphology under irradiation is found. The features of the dispersion of a chromium thin film having high adhesion to the dielectric substrate by a high-power ion beam are examined.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
V. Bystritskii, E. Garate, V. Grigoriev, A. Kharlov, E. Lavernia, et al., Nucl. Instrum. Methods Phys. Res. B 149, 61 (1999). doi: 10.1016/S0168-583X(98)00642-9
Surface Modification and Alloying by Laser, Ion, and Electron Beams, Ed. by J. M. Poate, G. Foti, and D. C. Jacobson (Plenum, New York, 1983; Mashinos-troenie, Moscow, 1987).
V. S. Kovivchak, T. V. Panova, R. B. Burlakov, and N. A. Davletkil’deev, Tech. Phys. Lett. 34, 358 (2008). doi: 10.1134/S1063785008040251
V. S. Kovivchak, V. I. Dubovik, and R. B. Burlakov, J. Surf. Invest.: X-ray, Synchrotron Neutron Tech. 3, 268 (2009). doi: 10.1134/S1027451009020189
Physical Values, The Handbook, Ed. by I. S. Grigor’ev and E. Z. Meilikhov (Energoatomizdat, Moscow, 1991) [in Russian].
Handbook of Thin Film Technology, Ed. by L. Maissel and R. Glang (McGraw-Hill, New York, 1970; Sov. Radio, Moscow, 1977).
J. I. Goldstein, D. E. Newbury, P. Echlin, et al., Scan-ning Electron Microscopy and X-ray Microanalysis (Klu-wer Academic, Plenum, New York, 2003).
A. F. Burenkov, F. F. Komarov, M. A. Kumakhov, et al., Tables of Ion Implantation Spatial Distributions (Belorus. Gos. Univ., Minsk, 1980; Harwood Aca-demic, Amsterdam, 1986).
V. S. Kovivchak, T. K. Panova, R. B. Burlakov, and G. I. Gering, Poverkhnost’, No. 7, 95 (2007).
V. S. Kovivchak, T. V. Panova, and G. I. Gering, Poverkhnost’, No. 4, 107 (2007).
X. Hu, D. G. Cahill, and R. S. Averback, J. Appl. Phys. 89, 7777 (2001). doi: 10.1063/1.1372623
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © V.S. Kovivchak, T.V. Panova, R.B. Burlakov, E.V. Knyazev, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 10, pp. 94–99.
Rights and permissions
About this article
Cite this article
Kovivchak, V.S., Panova, T.V., Burlakov, R.B. et al. Dispersion of thin metal films on dielectric substrates under high-power ion-beam irradiation. J. Surf. Investig. 9, 1093–1098 (2015). https://doi.org/10.1134/S1027451015050341
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1027451015050341