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Features of the effect of a high-power ion beam on polymer films deposited onto dielectric substrates

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Abstract

The effect of a nanosecond high-power ion beam on chlorinated polyvinyl chloride, reactive polymer with a conjugation system (poly-vinylene chloride), and FP-383 photoresist thin films, which are deposited onto sodium-silicate glass and ST-50 glass-ceramic substrates, is investigated. It is revealed that submicrometer particles with clearly defined crystallographic facets are formed on the irradiated surface of the chlorinated polymers. These particles include predominantly carbon and are probably carbynoid or diamond-like structures. The possible mechanisms of the observed phenomena are discussed.

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Authors and Affiliations

  1. Omsk State University, Omsk, 644077, Russia

    V. S. Kovivchak

  2. Omsk Scientific Center, Siberian Branch, Russian Academy of Sciences, Omsk, 644024, Russia

    V. S. Kovivchak, Yu. G. Kryazhev & E. V. Knyazev

  3. Institute of Hydrocarbon Processing, Siberian Branch, Russian Academy of Sciences, Omsk, 644040, Russia

    E. S. Martynenko

Authors
  1. V. S. Kovivchak
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  2. Yu. G. Kryazhev
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  3. E. S. Martynenko
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  4. E. V. Knyazev
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Correspondence to V. S. Kovivchak.

Additional information

Original Russian Text © V.S. Kovivchak, Yu.G. Kryazhev, E.S. Martynenko, E.V. Knyazev, 2015, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, 2015, No. 8, pp. 57–60.

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Kovivchak, V.S., Kryazhev, Y.G., Martynenko, E.S. et al. Features of the effect of a high-power ion beam on polymer films deposited onto dielectric substrates. J. Surf. Investig. 9, 812–815 (2015). https://doi.org/10.1134/S1027451015040291

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  • DOI: https://doi.org/10.1134/S1027451015040291

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