Skip to main content
Log in

Electron-stimulated oxidation of metal and semiconductor surfaces

  • Physical Chemistry of Surface Phenomena
  • Published:
Russian Journal of Physical Chemistry A Aims and scope Submit manuscript

Abstract

The electron-stimulated adsorption of oxygen from the gas phase is studied. The basic laws governing the changes in the surface structure induced by electron-stimulated adsorption are determined.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Similar content being viewed by others

References

  1. A. Zangwill, Physics at Surfaces (Cambridge Univ. Press, Cambridge, 1988).

    Book  Google Scholar 

  2. D. P. Woodruff and T. A. Delchar, Modern Techniques of Surface Science (Cambridge Univ., New York, Cambridge, London, 1986; Mir, Moscow, 1989).

    Google Scholar 

  3. O. G. Ashkhotov, I. B. Ashkhotova, and D. A. Krymshokalova, Phys. Met. Metallogr. 110, 553 (2010).

    Article  Google Scholar 

  4. O. G. Ashkhotov, I. B. Ashkhotova, and D. A. Krymshokalova, in Proceedings of the 10th All-Russia School-Seminar on Problems of Condensed State of Matter Physics (Yekaterinburg, 2009), p. 126.

    Google Scholar 

  5. H. G. Tompkins, Surf. Sci. 62, 293 (1977).

    Article  CAS  Google Scholar 

  6. O. G. Ashkhotov, I. B. Ashkhotova, A. P. Bliev, T. T. Magkoev, and D. A. Krymshokalova, Russ. J. Phys. Chem. A 88, 1757 (2014).

    Article  CAS  Google Scholar 

  7. N. Kasupke and M. Henzler, Surf. Sci. 92, 407 (1980).

    Article  CAS  Google Scholar 

  8. C. Scheuerlein and M. Taborelli, J. Vacuum Sci. Technol. A 20, 93 (2002).

    Article  CAS  Google Scholar 

  9. Y. Margoninski, D. Segal, and R. E. Kirby, Surf. Sci. 53, 488 (1975).

    Article  CAS  Google Scholar 

  10. J. P. Coad, H. E. Bishop, and J. C. Riviere, Surf. Sci. 21, 253 (1970).

    Article  CAS  Google Scholar 

  11. R. E. Kirby and D. Lichlman, Surf. Sci. 41, 447 (1974).

    Article  Google Scholar 

  12. R. Clampitt and D. K. Jefferies, Nucl. Instrum. Methods Phys. Res. 149, 739 (1978).

    Article  CAS  Google Scholar 

  13. V. G. Lifshits and A. A. Saranin, Ukr. Fiz. Zh. 27, 1213 (1982).

    CAS  Google Scholar 

  14. C. C. Chang, Characterisation of Solid Surfaces (Plenum, New York, 1974).

    Google Scholar 

  15. Yu. L. Gavriljuk and V. G. Lifshits, Solid State Commun. 36, 155 (1980).

    Article  Google Scholar 

  16. B. Carriere, A. Chouiyakh, and B. Lang, Surf. Sci. 126, 495 (1983).

    Article  CAS  Google Scholar 

  17. O. G. Ashkhotov, D. A. Krymshokalova, and I. B. Ashkhotova, Tech. Phys. 56, 697 (2011).

    Article  CAS  Google Scholar 

  18. O. G. Ashkhotov and I. B. Ashkhotova, Phys. Solid State 54, 1684 (2012).

    Article  CAS  Google Scholar 

  19. A. Benninghoven, C. A. Evans, and J Powell, Secondary Ion Mass Spectrometry SIMS II (Springer, Berlin, 1979).

    Book  Google Scholar 

  20. A. W. Czanderna, T. E. Madey, and C. J. Powell, Beam Effects, Surface Topography and Deph Profiling in Surface Analysis (Kluwer Academic, New York, 1996).

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to O. G. Ashkhotov.

Additional information

Original Russian Text © O.G. Ashkhotov, I.B. Ashkhotova, A.P. Bliev, T.T. Magkoev, B.E. Gergieva, 2016, published in Zhurnal Fizicheskoi Khimii, 2016, Vol. 90, No. 7, pp. 1088–1096.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Ashkhotov, O.G., Ashkhotova, I.B., Bliev, A.P. et al. Electron-stimulated oxidation of metal and semiconductor surfaces. Russ. J. Phys. Chem. 90, 1466–1473 (2016). https://doi.org/10.1134/S0036024416070025

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0036024416070025

Keywords

Navigation