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High Quality Factor Mechanical Resonance in a Silicon Nanowire

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Abstract

Resonance properties of nanomechanical resonators based on doubly clamped silicon nanowires, fabricated from silicon-on-insulator and coated with a thin layer of aluminum, were experimentally investigated. Resonance frequencies of the fundamental mode were measured at a temperature of 20 mK for nanowires of various sizes using the magnetomotive scheme. The measured values of the resonance frequency agree with the estimates obtained from the Euler–Bernoulli theory. The measured internal quality factor of the 5 μm-long resonator, 3.62 × 104, exceeds the corresponding values of similar resonators investigated at higher temperatures. The structures presented can be used as mass sensors with an expected sensitivity ~6 × 10−20 g Hz–1/2.

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Authors and Affiliations

  1. Quantum Technology Centre, Faculty of Physics, Moscow State University, Moscow, 119991, Russia

    D. E. Presnov, A. A. Dorofeev, I. V. Bozhev, A. S. Trifonov & V. A. Krupenin

  2. Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, 119991, Russia

    D. E. Presnov & A. S. Trifonov

  3. Department of Physics, Lancaster University, Lancaster, LA1 4YB, United Kingdom

    S. G. Kafanov & Yu. A. Pashkin

  4. Lebedev Physical Institute, Russian Academy of Sciences, Moscow, 119991, Russia

    Yu. A. Pashkin

Authors
  1. D. E. Presnov
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  2. S. G. Kafanov
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  3. A. A. Dorofeev
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  4. I. V. Bozhev
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  5. A. S. Trifonov
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Corresponding author

Correspondence to Yu. A. Pashkin.

Additional information

Published in Russian in Pis’ma v Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2018, Vol. 108, No. 7, pp. 522–528.

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Presnov, D.E., Kafanov, S.G., Dorofeev, A.A. et al. High Quality Factor Mechanical Resonance in a Silicon Nanowire. Jetp Lett. 108, 492–497 (2018). https://doi.org/10.1134/S0021364018190037

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  • DOI: https://doi.org/10.1134/S0021364018190037

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