Abstract
Methods for the formation of liquid, microdroplet, cluster, and gas targets in vacuum for use in laser-plasma radiation sources are considered. The characteristics of the used target-formation systems and gas-supply systems based on them are given. These systems form pulsed and static jets with low mass flow, on the order of ~70 mL/h of liquid or 1500 cm3/h of gas, which allows pumping out the vacuum volume with one turbomolecular pump with a capacity of 1000 L/s.
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ACKNOWLEDGMENTS
The work was supported financially by the Ministry of Science and Higher Education of the Russian Federation (Agreement no. 075-15-2021-1361).
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Guseva, V.E., Korepanov, M.A., Koroleva, M.R. et al. Methods for Forming Gas, Cluster Spray, and Liquid Targets in a Laser-Plasma Radiation Source. Instrum Exp Tech 66, 702–711 (2023). https://doi.org/10.1134/S0020441223030193
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DOI: https://doi.org/10.1134/S0020441223030193