Skip to main content
SpringerLink
Log in

Comparative Study of Gas-Dynamic Processes in Inductively Coupled Argon–Hydrogen Plasma Containing Boron Trichloride and Boron Trifluoride

  • PLASMA CHEMISTRY
  • Published:
High Energy Chemistry Aims and scope Submit manuscript

Abstract

A procedure for simulating gas-dynamic and thermal conditions during the conversion in a radiofrequency induction (RFI) plasma reactor has been developed. The model includes a turbulent flow of a mixture of ideal viscous compressible gases, taking into account inductive heating of the gas through heat conduction, convection, and radiation, considering the effect of the electromagnetic field force on the plasma motion. The formation of powder particles agrees with the results of thermodynamic calculations; the distribution of particles in the flow is described by the diffusion mechanism. The results of the simulation of the conversion of volatile boron chloride and boron fluoride in an RFI plasma torch with vortex-stabilized flow are presented.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1.
Fig. 2.
Fig. 3.
Fig. 4.
Fig. 5.

Similar content being viewed by others

REFERENCES

  1. Grishin, Yu.M. and Myao, L., Nauka Obraz. MGTU im. N.E. Baumana, Elektron. Zh., 2016, no. 5, p. 104.

  2. Cao, T. and Cheng, Y., Plasma Sources Sci. Technol., 2016, vol. 25, no. 2, p. 025011.

    Article  CAS  Google Scholar 

  3. Ivanov, D.V. and Zverev, S.G., IEEE Trans. Plasma Sci., 2017, vol. 45, no. 12, p. 3125.

    Article  CAS  Google Scholar 

  4. Reinisch, G., Leyssale, J.-M., Bertrand, N., Chollon, G., Langlais, F., and Vignoles, G., Surf. Coat. Technol., 2008, vol. 203, p. 643.

    Article  CAS  Google Scholar 

  5. Shabarova, L.V., Kornev, R.A., and Sennikov, P.G., High Energy Chem., 2018, vol. 52, no. 5, p. 423.

    Article  CAS  Google Scholar 

  6. Kut’in, A.M., Thermodynamic models of multicomponent heterophase systems and production of materials from organoelement compounds, Doctoral (Chemistry) Dissertation, Nizhny Novgorod, 2001.

  7. Iorish, V.S., Belov, G.V., and Yungman, V.S., Software suite IVTAN TERMO for Windows and its use in applied thermodynamic analysis, Preprint of Joint Institute for High Temperatures, Russ. Acad. Sci., Moscow, 1998, no. 8.

  8. Entsiklopediya nizkotemperaturnoi plazmy, kn. 1: Nizkotemperaturnaya plazma. Osnovnye ponyatiya, svoistva i zakonomernosti (Encyclopedia of Low-Temperature Plasma, book 1: Low-Temperature Plasma: Basic Concepts, Laws, and Properties), Fortov, V.E., ed.-in-chief, Moscow: Nauka, 2000.

    Google Scholar 

  9. Anderson, D.A., Tannehill, J.C., and Pletcher, R.H., Computational Fluid Dynamics and Heat Transfer, New York: Hemisphere, 1984.

    Google Scholar 

  10. Vorob'ev, A.Kh., Diffuzionnye zadachi v khimicheskoi kinetike (Diffusion Problems in Chemical Kinetics), Moscow: Izd. Moskovskogo Universiteta, 2003.

  11. Murphy, A.B., Plasma Chem. Plasma Process., 2000, vol. 20, no. 3, p. 279.

    Article  CAS  Google Scholar 

  12. Gamburg, D.Yu. Semenov, V.P., and Dubovkin, N.F., Vodorod. Svoistva, poluchenie, khranenie, transportirovanie, primenenie (Hydrogen: Properties, Production, Storage, Transportation, and Use), Moscow: Khimiya, 1989.

    Google Scholar 

  13. Bretsznajder, S., Wlasnosci gazow i cieczy (The Properties of Gases and Liquids), Warsaw: Wydawnictwo Naukowo-Techniczne, 1962.

Download references

ACKNOWLEDGMENTS

This work was supported by the Russian Science Foundation, project no. 17-13-01027.

Author information

Authors and Affiliations

  1. Institute of Chemistry of High-Purity Substances, Russian Academy of Sciences, 603950, Nizhny Novgorod, Russia

    L. V. Shabarova, A. D. Plekhovich, A. M. Kut’in, P. G. Sennikov & R. A. Kornev

Authors
  1. L. V. Shabarova
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. D. Plekhovich
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. A. M. Kut’in
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. P. G. Sennikov
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. R. A. Kornev
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to L. V. Shabarova.

Additional information

Translated by V. Avdeeva

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Shabarova, L.V., Plekhovich, A.D., Kut’in, A.M. et al. Comparative Study of Gas-Dynamic Processes in Inductively Coupled Argon–Hydrogen Plasma Containing Boron Trichloride and Boron Trifluoride. High Energy Chem 53, 155–161 (2019). https://doi.org/10.1134/S0018143919020140

Download citation

  • Received:

  • Revised:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1134/S0018143919020140

Keywords:

Search

Navigation