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Design and performance Analysis of PDMS Based Micropump

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Abstract

This paper presents the design and performance analysis of MEMS based piezoelectrically actuated micropump for drug delivery systems. The proposed micropump have achieved a flow velocity and flow rate of 8.92 m/s and 0.854 mL/min respectively at 50 V when BaTiO3 is used as piezoelectric material. The micropump comprises of four elements: electrodes, piezoelectric layer, flexible membrane and a reservoir. The obtained flow rate for the micropump is best suitable in cardio-vascular, hypertension cases where the drug need to be delivered with an appropriate flowrate.

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Authors and Affiliations

  1. MicroElectronics Research Group, Department of ECE, Koneru Lakshmaiah Education Foundation (Deemed to be University), Green Fields, Vaddeswaram, Guntur, 522502, India

    K. Srinivasa Rao, K. Chandrasekharam, S. Bandhavi Sai Sri, S. Suma, Md. Hamza & K. Grija Sravani

  2. National MEMS Design Center, Department of ECE, National Institute of Technology, Silchar, Assam, 788010, India

    K. Grija Sravani

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  1. K. Srinivasa Rao
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  2. K. Chandrasekharam
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  4. S. Suma
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Correspondence to K. Srinivasa Rao or K. Chandrasekharam.

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Rao, K.S., Chandrasekharam, K., Sai Sri, S.B. et al. Design and performance Analysis of PDMS Based Micropump. Trans. Electr. Electron. Mater. 21, 497–502 (2020). https://doi.org/10.1007/s42341-020-00200-4

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