Abstract
Full-field transmission X-ray microscopy (TXM) is a powerful non-destructive three-dimensional (3D) imaging method with a nanoscale spatial resolution that has been used in most synchrotron facilities worldwide. An in-house-designed TXM system was constructed at the BL18B 3D nanoimaging beamline at the Shanghai Synchrotron Radiation Facility. The beamline operates from 5 to 14 keV and enables 20 nm spatial resolution imaging. The characterization details of the beamline are described in this paper. The performances in terms of spatial resolution, nano-CT, and nano-spectral imaging of the TXM beamline are also presented in this article.
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The data that support the findings of this study are openly available in Science Data Bank at https://www.doi.org/10.57760/sciencedb.13606 and https://cstr.cn/31253.11.sciencedb.13606.
References
M.Y. Ge, D.S. Coburn, E. Nazaretski et al., One-minute nano-tomography using hard X-ray full-field transmission microscope. Appl. Phys. Lett. 113, 083109 (2018). https://doi.org/10.1063/1.5048378
S.S. Lee, I.H. Kwon, J.Y. Kim et al., Early commissioning results for spectroscopic X-ray nano-imaging beamline BL 7C sXNI at PLS-II. J. Synchrotron Rad. 24, 1276–1282 (2017). https://doi.org/10.1107/S1600577517013972
S. Wang, K. Zhang, W. Huang et al., Zone plate-based full-field transmission X-ray microscopy beamline design at nearly diffraction-limited synchrotron radiation facility. Nucl. Inst. Methods Phys. Res. A 993, 165089 (2021). https://doi.org/10.1016/j.nima.2021.165089
F.F. Yang, Y.J. Liu, S.K. Martha et al., Nanoscale morphological and chemical changes of high voltage lithium−manganese rich NMC composite cathodes with cycling. Nano Lett. 14, 4334–4341 (2014). https://doi.org/10.1021/nl502090z
S. Bauer, L.D. Biasi, S. Glatthaar et al., In operando study of the high voltage spinel cathode material LiNi0.5Mn1.5O4 using two dimensional full-field spectroscopic imaging of Ni and Mn. Phys. Chem. Chem. Phys. 17, 16388–16397 (2015). https://doi.org/10.1039/C5CP02075A
X.L. Tang, Z.X. Jiang, S. Jiang et al., Heterogeneous nanoporosity of the Silurian Longmaxi Formation shale gas reservoir in the Sichuan Basin using the QEMSCAN, FIB-SEM, and nano-CT methods. Mar. Pet. Geol. 78, 99–109 (2016). https://doi.org/10.1016/j.marpetgeo.2016.09.010
Y.F. Sun, Y.X. Zhao, L. Yuan et al., Quantifying nano-pore heterogeneity and anisotropy in gas shale by synchrotron radiation nano-CT. Micropor. Mesopor. Mat. 258, 8–16 (2018). https://doi.org/10.1016/j.micromeso.2017.08.049
A. Ronne, L. He, D. Dolzhnikov et al., Revealing 3D morphological and chemical evolution mechanisms of metals in molten salt by multimodal microscopy. ACS Appl. Mater. Interfaces 12, 17321–17333 (2020). https://doi.org/10.1021/acsami.9b19099
J.K. Lee, P. Kim, K. Krause et al., Designing catalyst layer morphology for high-performance water electrolysis using synchrotron X-ray nanotomography. Cell Rep. Phys. Sci. 4, 101232 (2023). https://doi.org/10.1016/j.xcrp.2022.101232
J.C. Andrews, F. Meirer, Y.J. Liu et al., Transmission X-ray microscopy for full-field nano-imaging of biomaterials. Microsc. Res. Tech. 74, 671–681 (2011). https://doi.org/10.1002/jemt.20907
P. Liu, D. Yen, B.S. Vishnugopi et al., Influence of potassium metal-support interactions on dendrite growth. Angew. Chem. Int. Ed. 62, e2023009 (2023). https://doi.org/10.1002/anie.202300943
P.F. Sun, B. Deng, Q. Yang et al., An accelerated OSEM reconstruction algorithm using an accelerating factor for X-ray fluorescence tomography. Nucl. Tech. 38, 060201 (2015). https://doi.org/10.11889/j.0253-3219.2015.hjs.38.060201. (in Chinese)
M.W. Xu, Y.L. Xue, R.C. Chen et al., A biometrics recognition instrument using X-ray phase contrast imaging for biosafety inspection. Nucl. Tech. 44, 080202 (2021). https://doi.org/10.11889/j.0253-3219.2021.hjs.44.080202. (in Chinese)
Z.J. Qiu, K. Li, H.L. Xie et al., Study of 20 Hz high spatial-temporal resolution monochromatic X-ray dynamic micro-CT. Nucl. Tech. 46, 070101 (2023). https://doi.org/10.11889/j.0253-3219.2023.hjs.46.070101. (in Chinese)
J. Kirz, D. Attwood, X-ray data booklet. Section 4.4 ZONE PLATES (2009)
W.Z. Zhang, J.C. Tang, S.S. Wang et al., The protein complex crystallography beamline (BL19U1) at the Shanghai synchrotron radiation facility. Nucl. Sci. Tech. 30, 170 (2019). https://doi.org/10.1007/s41365-019-0683-2
F. Tao, Y.D. Wang, Y.Q. Ren et al., Design and detection of ellipsoidal mono-capillary for X-ray nano-imaging. Acta Opt. Sin. 37, 1034002 (2017). https://doi.org/10.3788/AOS201737.1034002. (in Chinese)
F. Tao, B. Feng, B. Deng et al., Micro X-ray fluorescence imaging based on ellipsoidal single-bounce mono-capillary. Spectros. Spect. Anal. 40, 2011–2015 (2020). https://doi.org/10.3964/j.issn.1000-0593(2020)07-2011-05. (in Chinese)
F. Meirer, J. Cabana, Y.J. Liu et al., Three-dimensional imaging of chemical phase transformations at the nanoscale with full-field transmission X-ray microscopy. J. Synchrotron Rad. 18, 773–781 (2011). https://doi.org/10.1107/S0909049511019364
Y. Kim, J. Lim, Exploring spectroscopic X-ray nano-imaging with Zernike phase contrast enhancement. Sci. Rep. 12, 2894 (2022). https://doi.org/10.1038/s41598-022-06827-y
F. Tao, J. Wang, G.H. Du et al., Full-field hard X-ray nano-tomography at SSRF. J. Synchrotron Rad. 30, 815–821 (2023). https://doi.org/10.1107/S1600577523003168
F. Li, Y. Guan, Y. Xiong et al., Method for extending the depth of focus in X-ray microscopy. Opt. Express 25, 7657–7667 (2017). https://doi.org/10.1364/OE.25.007657
B. Su, R.Y. Gao, T. Fen et al., Dual U-Net based feature map algorithm for automatic projection alignment of synchrotron nano-CT. Nucl. Inst. Methods Phys. Res. A 1040, 167242 (2022). https://doi.org/10.1016/j.nima.2022.167242
Y.J. Liu, F. Meirer, J.Y. Wang et al., 3D elemental sensitive imaging using transmission X-ray microscopy. Anal. Bioanal. Chem. 404, 1297–1301 (2012). https://doi.org/10.1007/s00216-012-5818-9
Y.J. Liu, F. Meirer, P.A. Williams, TXM-Wizard: a program for advanced data collection and evaluation in full-field transmission X-ray microscopy. J. Synchrotron Rad. 19, 281–287 (2012). https://doi.org/10.1107/S0909049511049144
SSRFDA System V1.0, National Copyright Administration of the People’s Republic of China. (Registration number: 2022SR1004270)
S. Vogt, G. Schneider, A. Steuernagel et al., X-Ray microscopic studies of the drosophila dosage compensation complex. J. Struct. Biol. 132, 123–132 (2000). https://doi.org/10.1006/jsbi.2000.4277
T.Y. Chen, Y.T. Chen, C.L. Wang et al., Full-field microimaging with 8 keV X-rays achieves a spatial resolutions better than 20 nm. Opt. Express 19, 19919–19924 (2011). https://doi.org/10.1364/OE.19.019919
J. Wang, Y.K. Chen, Q. Yuan et al., Automated markerless full field hard X-ray microscopic tomography at sub-50nm 3-dimension spatial resolution. Appl. Phys. Lett. 100, 143107 (2012). https://doi.org/10.1063/1.3701579
Q.X. Yuan, K. Zhang, Y. Hong et al., A 30 nm-resolution hard X-ray microscope with X-ray fluorescence mapping capability at BSRF. J. Synchrotron Rad. 19, 1021–1028 (2012). https://doi.org/10.1107/S0909049512032852
Y.F. Su, Q.Y. Zhang, L. Chen et al., Stress accumulation in Ni-rich layered oxide cathodes: Origin, impact, and resolution. J. Energy Chem. 65, 236–253 (2022). https://doi.org/10.1016/j.jechem.2021.05.048
P.C. Tsai, B. Wen, M. Wolfman et al., Single-particle measurements of electrochemical kinetics in NMC and NCA cathodes for Li-ion batteries. Energy Environ. Sci. 11, 860–871 (2018). https://doi.org/10.1039/c8ee00001h
A. Jetybayeva, N. Schön, J. Oh et al., Unraveling the state of charge-dependent electronic and ionic structure—property relationships in NCM622 cells by multiscale characterization. ACS Energy Lett. 5, 1731–1742 (2022). https://doi.org/10.1021/acsaem.1c03173
J. Chen, Y. Yang, Y. Tang et al., Constructing a thin disordered self-protective layer on the LiNiO2 primary particles against oxygen release. Adv. Funct. Mater. 33, 2211515 (2023). https://doi.org/10.1002/adfm.202211515
Acknowledgements
The authors also wish to acknowledge their colleagues from the Department of Beamline Engineering at the SSR for their assistance during the construction of the BL18B beamline.
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All authors contributed to the study conception and design. Material preparation, data collection, and analysis were performed by Ling Zhang, Fen Tao, Jun Wang, Ruo-Yang Gao, Bo Su, Guo-Hao Du, Ai-Guo Li, Ti-Qiao Xiao, and Biao Deng. The first draft of the manuscript was written by Ling Zhang, and all authors commented on previous versions of the manuscript. All authors read and approved the final manuscript.
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This work was supported by the National Key Research and Development Program of China (Nos. 2021YFA1600703, 2021YFF0701202, and 2021YFA1601001) and the National Natural Science Foundation of China (Nos. 12275343 and U1932205).
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Zhang, L., Tao, F., Wang, J. et al. The 3D nanoimaging beamline at SSRF. NUCL SCI TECH 34, 201 (2023). https://doi.org/10.1007/s41365-023-01347-4
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DOI: https://doi.org/10.1007/s41365-023-01347-4