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Effect on friction reduction of micro/nano hierarchical patterns on sapphire wafers

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Abstract

As well as the micro patterns, many functional surfaces exhibit micro/nano hierarchical patterns. Micro- and nano-patterned surfaces can be fabricated using various techniques including photolithography, electron-beams, and so on. However, these processes were developed for semiconductor fabrication and are not convenient for large-area applications. In this paper, we describe a manufacturing process for micro/nano hierarchical patterns using a laser and an abrasive air jet, whereby the laser is used to manufacture microscale patterns, and an abrasive air jet is applied to the micro-patterned surface to generate the nanoscale patterns. This method is a simple process that can be used to rapidly manufacture hierarchical patterns, making it suitable for large-area applications. We also developed a friction test system, which minimizes external vibrations and sample wear during the measurements. Our results showed that the coefficient of friction of the hierarchical patterns was 12% smaller than that of microscale patterns.

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Abbreviations

C s :

Coefficient of maximum static friction

C k =C f :

Coefficient of kinematic friction

μ :

Dynamic viscosity

U :

Velocity in friction test

P :

Pressure in friction test

O :

Initial sapphire surface

N :

Nano patterned surface

M :

Micro patterned surface

M+N :

Micro/Nano hierarchical patterned surface

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Authors and Affiliations

  1. Department of Nano Fusion Technology, Pusan National University, 1268-50, Samnangjin-ro, Samnangjin-eup, Miryang-si, Gyeongsangnam-do, 50463, South Korea

    Miru Kim &  Liang-Li

  2. Ulsan Center for Creative Economy & Innovation, 93, Daehak-ro, Nam-gu, Ulsan, 44610, South Korea

    Sang Min Lee

  3. Interdisciplinary Department for Innovative Manufacturing Engineering, Pusan National University, 2, Busandaehak-ro 63beon-gil, Geumjeong-gu, Busan, 46241, South Korea

    Seung Jun Lee

  4. ERC of Innovative Technology on Advanced Forming, Pusan National University, 2, Busandaehak-ro 63beon-gil, Geumjeong-gu, Busan, 46241, South Korea

    Yong Woo Kim

  5. Department of Nanomechatronics Engineering, Pusan National University, 1268-50, Samnangjin-ro, Samnangjin-eup, Miryang-si, Gyeongsangnam-do, 50463, South Korea

    Deug Woo Lee

Authors
  1. Miru Kim
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  2. Sang Min Lee
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  3. Seung Jun Lee
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  4. Yong Woo Kim
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  5. Liang-Li
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Correspondence to Deug Woo Lee.

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Kim, M., Lee, S.M., Lee, S.J. et al. Effect on friction reduction of micro/nano hierarchical patterns on sapphire wafers. Int. J. of Precis. Eng. and Manuf.-Green Tech. 4, 27–35 (2017). https://doi.org/10.1007/s40684-017-0004-3

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  • DOI: https://doi.org/10.1007/s40684-017-0004-3

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