Abstract
Aerosol deposition is a thick-film deposition process that can produce layers up to several hundred micrometers thick with densities greater than 95 pct of the theoretical value. The primary advantage of aerosol deposition is that the deposition takes place entirely at room temperature, thereby enabling film growth in material systems with disparate melting temperatures. We show representative characterization results of yttrium iron garnet thick films deposited onto a 〈111〉 gadolinium gallium garnet substrate by aerosol deposition using scanning electron microscopy, X-ray diffraction, profilometry, vibrating sample magnetometry, and ferromagnetic resonance. To further elucidate the effect of density and grain size on the magnetic properties, we perform post-deposition annealing of the films to study the effect on the structural and magnetic properties of the films. Our results indicate that our system can successfully deposit dense, thick yttrium iron garnet films and that with moderate annealing the films can achieve a ferromagnetic resonance linewidth comparable to that reported for polycrystalline films deposited by other higher temperature growth techniques.
Similar content being viewed by others
References
J. Akedo, J. Therm. Spray Technol. 17, 181–98 (2008)
B.D. Hahn, D.-S. Park, J.J. Choi, J. Ryu, W.H. Yoon, J.-H. Choi, J.-W. Kim, C.-W. Ahn, H.-E. Kim, B.-H. Yoon, I.-K. Jung, Appl. Surf. Sci. 283, 6–11 (2013)
W.-H. Lee, H.-J. Kim, D.-W. Lee, M.-G. Jeong, D.-S. Lim, S.M. Nam, Surf. Coat. Technol. 206, 4679–84 (2012)
K. Naoe, M. Nishiki, K. Sato, J. Therm. Spray Technol. 23(8), 1333–38 (2014)
D.-W. Lee, S.-M. Nam, J. Ceram. Process. Res. 11(1), 100–06 (2010)
S.D. Johnson, E.R. Glaser, S.-F. Cheng, H.S. Newman, M.J. Tadjer, F.J. Kub, C.R. Eddy Jr, IEEE Trans. Magn. 51(05), 1–6 (2015)
S.D. Johnson, F.J. Kub, C.R. Eddy Jr, Proc. SPIE 8708, 87080T-1 (2013)
G. Han, J. Ryu, W.-H. Yoon, J.-J. Choi, B.-D. Hahn, J.-W. Kim, D.-S. Park, Ceram. Int. 38(1), S241–44 (2012)
J. Ryu, C.-W. Baek, Y.-S. Lee, N.-K. Oh, G. Han, J.-W. Kim, B.-D. Hahn, J.-J. Choi, W.-H. Yoon, J.-H. Choi, D.-S. Park, D.-Y. Jeong, J. Am. Ceram. Soc. 94(2), 355–58 (2011)
C.-S. Park, J. Ryu, J.-J. Choi, D.-S. Park, C.-W. Ahn, S. Priya, Jpn. J. Appl. Phys. 48(8), 080204 (2009)
J. Ryu, D.-S. Park, R. Schmidt, J. Appl. Phys. 109(11), 113722 (2011)
W.-H. Yoon, J. Ryu, J.-J. Choi, B.-D. Hahn, J.H. Choi, B.-K. Lee, J.-H. Cho, D.-S. Park, J. Am. Ceram. Soc. 93(8), 2125–27 (2010)
J. Ryu, K.-Y. Kim, J.-J. Choi, B.-D. Hahn, W.-H. Yoon, B.-K. Lee, D.-S. Park, D.-Y. Jeong, C. Park, J. Am. Ceram. Soc. 92(2), 524–27 (2009)
B.-D. Hahn, J.-M. Lee, D.-S. Park, J.-J. Choi, J. Ryu, W.-H. Yoon, B.-K. Lee, D.-S. Shin, H.-E. Kim, Acta Biomater. 5(8), 3205–14 (2009)
J.-J. Choi, K.-S. Cho, J.-H. Choi, J. Ryu, B.-D. Hahn, J.-W. Kim, C.-W. Ahn, W.-H. Yoon, J. Yun, D.-S. Park, Mater. Lett. 70, 44–47 (2012)
J. Ryu, B.-D. Hahn, J.-J. Choi, W.-H. Yoon, B.-K. Lee, J.H. Choi, D.-S. Park, J. Am. Ceram. Soc. 93(1), 55–58 (2010)
V.G. Harris, A. Geiler, Y. Chen, S.D. Yoon, M. Wu, A. Yang, Z. Chen, P. He, P.V. Parimi, X. Zuo, C.E. Patton, M. Abe, O. Acher, C. Vittoria, J. Magn. Magn. Mat. 321, 2035–47 (2009)
C. Yang, F. Liu, T.-L. Ren, L.-T. Liu, G. Chen, X.-K. Guan, A. Wang, H.-G. Feng, IEEE Elec. Dev. Lett. 28(7), 652–55 (2007)
K. Arai, M. Yamaguchi, H. Ohzeki, M. Matsumoto, IEEE Trans. Magn. 27(6, 2), 5337–39 (1991)
E. Haddad, C. Martin, C. Joubert, B. Allard, M. Soueidan, M. Lazar, C. Buttay, B. Payet-Gervy, Adv. Mat. Res. 324, 294–97 (2011)
H.L. Glass, M.T. Elliott, J. Cryst. Growth 34, 285–88 (1976)
Y.M. Kang, S.H. Wee, S. Baik, S.G. Min, S.C. Yu, S.H. Moon, Y.W. Kim, S.I. Yoo, J. Appl. Phys. 97(10), 10A319 (2005)
S.D. Johnson, E.R. Glaser, S.-F. Cheng, F. Kub, C.R. Eddy Jr, Appl. Phys. Express 7, 035501 (2014)
S.D. Johnson, E.R. Glaser, F.J. Kub, C.R. Eddy Jr, J. Vis. Exp. 99, e52843 (2015)
P. Pauthenet, J. Appl. Phys. 30(4), S290–92 (1959)
P.E. Seiden, J.G. Grunberg, J. Appl. Phys. 34(6), 1696–98 (1963)
S.S. Kalarickal, P. Krivosik, J. Das, K.S. Kim, C.E. Patton, Phys. Rev. B 79, 054427 (2008)
S.S. Kalarickal, N. Mo, P. Krivosik, C.E. Patton, Phys. Rev. B 79, 094427 (2009)
A.V. Nazarov, D. Menard, J.J. Green, C.E. Patton, J. Appl. Phys. 94(11), 7227–34 (2003)
J. Dho, E.K. Lee, J.Y. Park, N.H. Hur, J. Magn. Magn. Mat. 285, 164–68 (2005)
Author information
Authors and Affiliations
Corresponding author
Additional information
U.S. Government Work. Not protected by U.S. Copyright.
Manuscript submitted June 15, 2015.
Rights and permissions
About this article
Cite this article
Johnson, S.D., Glaser, E.R., Cheng, SF. et al. Thick-Film Yttrium Iron Garnet Coatings via Aerosol Deposition. Metallurgical and Materials Transactions E 3, 1–5 (2016). https://doi.org/10.1007/s40553-015-0063-8
Published:
Issue Date:
DOI: https://doi.org/10.1007/s40553-015-0063-8